Genmark’s Vacuum Cluster Integration System implements the latest automation technologies to its family of factory automation solutions.

The ECS300 Automation Software Suite is a set of software components, tools and techniques used for rapid development of equipment automation applications. It offers off-the-shelf factory host-computer interface, which are compliant with all related SEMI standards. The product features advanced user interface, broad range of supported automation hardware and presets for many 300mm semiconductor factories.

Genmark’s SortMax300 HT™ is capable of achieving the highest wafer per hour throughput requirements while operating under strict reliability and cleanliness specifications.

The Porta300™ plus is an advanced load port for 300mm wafer carriers.