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Genmark’s Vacuum Cluster Integration System implements the latest automation technologies to its family of factory automation solutions.
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![Mini-Max<span class='small-trade'>™</span> [EFEM]](thumb.html?width=87&filename=userfiles/product/minimax-efem1.jpg)
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Genmark’s MiniMax™ Equipment Front End Module (EFEM) is a class 1 minienvironment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation.
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Genmark’s 450mm Wafer Handling Systems for atmospheric and vacuum applications, developed and tested in conjunction with ISMI’s Interoperability Test Bed (ITB) program for interoperability testing of prototype automation and equipment interfaces, are the newest highly configurable and SEMI standards compliant wafer substrate handlers that effectively deliver high performance with cost competiveness.
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Genmark's SortMax300™ is a next generation SORTER producing the highest throughput rapid software set-up and lowest cost-of-ownership culminating from 25 years' experience in design, development, and manufacture of wafer handling equipment.
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Enhance productivity with Genmark’s latest wafer sorter product, the SortMax300 HC ™ High Capacity Sorter, achieving the highest throughput in modular equipment configurations supporting up to 14 FOUP/FOSB stations.
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Genmark’s SortMax300 HT™ is capable of achieving the highest wafer per hour throughput requirements while operating under strict reliability and cleanliness specifications.
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Achieve exceptional performance with Genmark's SortMax200™ wafer sorter, designed for handling wafers up to 200mm. The SortMax200™ can be configured to accommodate a maximum number of eight open cassette stations.
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Gain competitive advantage with Genmark's SortMax300 HWS™ wafer sorter-packing solution, designed to automatically sort, pack, and unpack wafers up to 300mm without damage and with absolute traceability.
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Genmark’s expansive Substrate Stocker series supporting front-end and back-end IC manufacturing processes incorporates its most advanced robotics, motion control and software technologies to achieve high levels of automation in the storage, retrieval and tracking of many types of wafer carriers, box reticles and molds used in semiconductor fabrication environments.
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Genmark's next-generation FOUP Stocker systems incorporates advanced robotics featuring highly optimized blended motions and control software technology to achieve fully automation of FOUP storage, retrieval and tracking operations.
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