The Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment, where the material handling is performed by robots limited vertical motion capabilities.
The Vacuum Elevator may have one or two servo-controlled axes. The single-axis elevator provides vertical indexing with 7, 14, 17 inches travel. The double-axis elevator has additional 360 degrees rotation around the vertical axis. Both translational and rotational mechanisms are isolated from the atmospheric environment by using Ferro-fluidic and magnetically-coupled seals.
| Configuration | |
| Wafer Carrier Type | Wafer cassettes and boats |
| Physical Properties | |
| Size (Diameter) |
Single axis 10.35", two axes 12.50" |
| Body Height |
7" travel – 15.6", 14" travel – 22.6" 17" travel – 25.6" |
| Axes | 1 or 2: Z or Z and T |
| Range of Motion |
Z: 7", 14", 17"; T : 360 degrees |
| Performance | |
| Payload | 20 lb |
| Base Operating Pressure | 10E-8 Torr |
| Leak rate | <1*10E-9 std cc/sec |
| Repeatability | |
| Rotational (T) | T: +/- 0.01 degree |
| Vertical (Z) | Z: +/- 0.001" |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer contact Materials | Aluminum, SS, Viton, Vacuum Grease |
