The GPR-GB9 Vacuum Robot System is one of the latest additions to Genmark’s GPR™ line of precision transport robotics and is available with vertical stroke options of 3" and 6".
The GPR-GB9 provides accurate, repeatable indexing and transportation of semiconductor wafers in vacuum processing capital equipment down to 10-10 Torr. This robot features Genmark Automation’s breakthrough GPR™ System to achieve the highest level of performance currently available in a 300/450mm compatible vacuum wafer/FPD handler.
The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.
| Configuration | |
| Wafer Sizes |
Wafers up to 450mm Platters and other fixtures |
| Arm Configuration(s) |
2 Link 7.5"-7.5" 2 Link 10.5"-10.5" 2 Link 12.5"-12.5" |
| End Effectors Types | Gravity |
| Physical Properties | |
| Size (Diameter) | 14" |
| Body Height |
3" travel - 26.2" 6" travel - 29.2" |
| Axes | 3: T, R, Z. |
| Range of Motion |
T: 500°
R (heavy duty arm): Tilt: 1.0° |
| Performance | |
| Payload |
25lbs (standard arms) 33lbs (heavy duty arms) |
| Base Operating Pressure | 10E-10 Torr |
| Leak rate | <1*10E-9 std cc/sec |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" |
| Radial ( R ) | 0.001" |
| Rotational ( T ) | 0.01° |
| Vertical ( Z ) | 0.001" |
| Reliability (MTBF) | >80,000 hours |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer contact Materials | Aluminum, SS, Viton, Vacuum Grease |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 | >14M MCBF |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement.
The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
