Product Highlight

GPR-GB9 Vacuum Robot System (300/450mm)
GPR-GB9 Vacuum Robot System (300/450mm)


  • GPR technology
  • Alignment free
  • Ultra high vacuum compatible ( to 10E-10 Torr)
  • Less than class 1 clean room compatible
  • Vertical travel up to 6.00” eliminating need for indexers and elevators
  • High payload, ideal choice for large FPD and wafer platen applications
  • Mountable from top or bottom of mounting plate
  • Deflection compensation
  • DSP-based motion control for vibration-free wafer transport

GPR-GB9 Vacuum Robot System (300/450mm)

The GPR-GB9 Vacuum Robot System is one of the latest additions to Genmark’s GPR™ line of precision transport robotics and is available with vertical stroke options of 3" and 6".

The GPR-GB9 provides accurate, repeatable indexing and transportation of semiconductor wafers in vacuum processing capital equipment down to 10-10 Torr. This robot features Genmark Automation’s breakthrough GPR™ System to achieve the highest level of performance currently available in a 300/450mm compatible vacuum wafer/FPD handler.

The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.


Wafer Sizes Wafers up to 450mm
Platters and other fixtures
Arm Configuration(s) 2 Link 7.5"-7.5"
2 Link 10.5"-10.5"
2 Link 12.5"-12.5"
End Effectors Types Gravity
Physical Properties  
Size (Diameter) 14"
Body Height 3" travel - 26.2"
6" travel - 29.2"
Axes 3: T, R, Z.
Range of Motion

T: 500°
- 7.5"-7.5": +/- 14.5"
- 10.5"-10.5": +/- 20"
- 12.5"-12.5": +/- 24"

R (heavy duty arm):
 - 12.5"-12.5": +/- 24"
Z: 3", 6"

Tilt: 1.0°


25lbs (standard arms)

33lbs (heavy duty arms)

Base Operating Pressure 10E-10 Torr
Leak rate <1*10E-9 std cc/sec
Repeatability T: +/- 0.01°
R: +/- 0.001"
Z: +/- 0.001"
Radial ( R ) 0.001"
Rotational ( T ) 0.01°
Vertical ( Z ) 0.001"
Reliability (MTBF) >80,000 hours
Cleanliness < Class 1 Clean Room Compatible
Wafer contact Materials Aluminum, SS, Viton, Vacuum Grease
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
Standards to Verify Compliance EN 60204-1:1997
EN ISO 12100-2:2003
RIA R15.06:1999
Reliability per SEMI E10 >14M MCBF

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance with SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.  
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement.
The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications.

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication Interface: RS232, Ethernet (optional).