Product Highlight

AVR SMV 3000 Vacuum Robot System (300/450mm)


  • Minimizes the idle-time of the process modules due to quicker wafer-swap
  • Advanced motion planning and axes coordination
  • Smallest footprint for its reach, provides the most efficient usage of the available space around the robotic system
  • Radial cassettes / process chambers access capabilities
  • DSP-based motion control for vibration free wafer transport
  • Less than class 1 clean room compatible

AVR SMV 3000 Vacuum Robot System (300/450mm)

The AVR SMV 3000 is a high-performance dual-arm vacuum robot that provides precise, reliable and repeatable wafer transportation in vacuum processing capital equipment down to 10E-10 Torr.

Latest technology incorporated into the arm and transmission design guarantees zero backslash after the inevitable collision with the occasionally "overactive" gate valve. This translates into immediate recovery without having to re-teach the robot. The mechanics of this robot contribute to its simplicity, modular design, easy control, teaching and programming.

Advanced motion planning in continuous smooth trajectories guarantees superior performance and effective implementation in various back-end layouts.

The AVR SMV 3000 is available with various end - effector options, allowing the robot to transport a wide array of wafers, FPDs and photomasks.


Wafer Sizes Wafers up to 300mm
Arm Configuration(s) 2 Link 7.5"-7.5"
End Effectors Types Gravity
Physical Properties  
Size (Diameter) 11.5"
Body Height 20.46"
Axes 4: T, R, R2, Z.
Range of Motion T: 360°
R and R2: -7.25"-7.25": [-13.775", 13.775"]
Z: 1.5"
Payload 12 lb
Base Operating Pressure 10E-10 Torr
Leak rate <1*10E-9 std cc/sec
Repeatability T: +/- 0.01°
R: +/- 0.001"
R2: +/- 0.001"
Z: +/- 0.001"
Radial ( R ) 0.001"
Rotational ( T ) 0.01°
Vertical ( Z ) 0.001"
Reliability (MTBF) >80,000 hours
Cleanliness < Class 1 Clean Room Compatible
Wafer contact Materials Aluminum, SS, Viton, Vacuum Grease
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
Standards to Verify Compliance EN 60204-1:1997
EN ISO 12100-2:2003
RIA R15.06:1999
Reliability per SEMI E10 >14M MCBF

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance with SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.  
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement.
The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications.

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication Interface: RS232, Ethernet (optional).