Product Highlight

AVR 3000 Vacuum Robot System (300/450mm)


  • DSP-based motion control for vibration – free wafer transport
  • Less than class 1 clean room compatible
  • Radial cassettes / process chambers access capabilities

AVR 3000 Vacuum Robot System (300/450mm)

The AVR-3000 Vacuum Robot System provides highly precise and reliable transportation in ultra-clean, high-vacuum processing environment. The AVR-3000 is operable up to 10E-10 Torr.

Special kinematics and motion transmitting design guarantee fast motion of the arm, zero backlash, and robustness against excessive external forces, applied to the links.

Advanced motion coordination over multi-segment trajectories with overlapping velocity profiles guarantees smooth and effective material transfer.

The AVR-3000 has 0.5" vertical travel and is available with various end-effector options, allowing the robot to transport a wide array of wafers up to 450mm, photo-masks, FPD's over an extended radial reach.


Wafer Sizes Wafers up to 450mm
Platters and other fixtures
Arm Configuration(s) 2 Link 5.25"-5.25"
2 Link 7.5"-7.5"
2 Link 10.5"-10.5"
2 Link 12.5"-12.5"
End Effectors Types Gravity
Physical Properties  
Size (Diameter) 9.83"
Body Height 12.77"
Axes 3: T, R, Z
Range of Motion T: 500°
 - 5.25"-5.25": -7.5",10.5"
- 7.5"-7.5": +/- 14.5"
- 10.5"-10.5": +/- 20"
- 12.5"-12.5": +/- 24"
Z: 1"
Payload 5lb
Base Operating Pressure 10E-10 Torr
Leak rate <1*10E-9 std cc/sec
Repeatability T: +/- 0.01°
R: +/- 0.001"
Z: +/- 0.001"
Radial ( R ) 0.001"
Rotational ( T ) 0.01°
Vertical ( Z ) 0.001"
Reliability (MTBF) >80,000 hours
Cleanliness < Class 1 Clean Room Compatible
Wafer contact Materials Aluminum, SS, Viton, Vacuum Grease
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
Standards to Verify Compliance EN 60204-1:1997
EN ISO 12100-2:2003
RIA R15.06:1999
Reliability per SEMI E10 >12.7M MCBF

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance with SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.  
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement.
The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications.

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication Interface: RS232, Ethernet (optional).