Genmark’s newest robotic series, the G-Rex3™ addresses all current technical specifications for standard payload 300mm and 450mm wafer transport tool applications as the most precise and highest throughput atmospheric robot solution currently available on the market.
The G-Rex3™ robotic system offers a small footprint, optimal throughput, reliability and serviceability in a cost effective package. It features innovative patent-pending designs, advanced control approaches and EZTeach technologies resulting in improved performance and reliability. The G-Rex3™ is a simplified low-mass design with fewer parts and moving components. The result is improved dynamics leading to higher acceleration and speed.
G-Rex3™ is easy to install, teach, program and troubleshoot. Due to its versatility the G-Rex3™ supports diverse tool applications and flexible customizable configurations, including single and dual arm, single and dual blade end-effectors, and vacuum or edge hold support.
| G-Rex 3 v.1 | G-Rex 3 v.2 | |
| Configuration | ||
| Wafer Size | up to 450mm | up to 450mm |
| Arm Configuration(s) |
2 Link: 5.25"-5.25; 2 Link: 7-25"-7.25"; 3 Link: 4"-8"-4" |
5.205"-5.205" |
| End Effectors Types | Vacuum, Edge-Gripping, Gravity | Vacuum, Edge-Gripping, Gravity |
| Wafer Mapping | reflective; through-beam | Through-beam at the back side of the EE |
| Physical Properties | ||
| Size (Diameter/Length) | 9.76" (body DIA) and 30.25" | 9.8"/20.94" |
| vert. stroke - body height |
7" - 13.6" 12" - 18.6" 17" - 23.6" 20" - 26.6" |
NA (Grey) |
| Axes | 3 - T, R, Z | 3 - T, R, Z |
| Range of Motion |
T: 500° R: - 5.25'-5.25': [-10.41 - 10.41] - 7.25'-7.25': [-14.5", 14.5"] - 4"-8"-4": [-16", 16"] Z: 7"; 12"; 17"; 20" |
T: 500° R: [-10.41 - 10.41] Z: [10.7"] |
| Performance | ||
| Payload (Dynamic/Static) | 2 lbs | 2 lbs |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0/001" |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0/001" |
| Environment | ||
| Cleanliness | ISO Class 1 Compatible | ISO Class 1 Compatible |
| Wafer Contact Material | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards Compliance | ||
| Applicable Directives/Standards |
Machine Directive 89/392/EEC 89/336/EEC (EMC) S2-93A S8-95 |
Machine Directive 89/392/EEC 89/336/EEC (EMC) S2-93A S8-95 |
| Standards to Verify Compliance |
EN 55011 EN 50082-1 EN 60204-1 |
EN 55011 EN 50082-1 EN 60204-1 |
| Reliability per SEMI E10 | >15M MCBF | >15M MCBF |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
