Product Highlight

G-Rex3<span class='small-trade'>™</span> Robot System (300/450mm)


  • Low body weight for higher acceleration and yields
  • Extended reach and vertical travel combination
  • Extended rotation motion range
  • DSP-based motion controller for vibration-free wafer transport
  • Advanced motion planning and blending
  • Optimal PID timing and gains scheduling
  • Modular design
  • Optional fast scanning feature
  • ISO Class 1



  • Superior motion performance
  • Low particle generation and higher yields
  • Increased reliability due to fewer moving parts
  • Optimal throughput and repeatability
  • Maximum tool uptime
  • Modular design reduces service cycle times
  • Easy maintenance and service
  • Lower preventive maintenance than GB4S

G-Rex3 Robot System (300/450mm)

Genmark’s newest robotic series, the G-Rex3™ addresses all current technical specifications for standard payload 300mm and 450mm wafer transport tool applications as the most precise and highest throughput atmospheric robot solution currently available on the market.

The G-Rex3™ robotic system offers a small footprint, optimal throughput, reliability and serviceability in a cost effective package. It features innovative patent-pending designs, advanced control approaches and EZTeach technologies resulting in improved performance and reliability.  The G-Rex3™ is a simplified low-mass design with fewer parts and moving components. The result is improved dynamics leading to higher acceleration and speed.

G-Rex3™ is easy to install, teach, program and troubleshoot. Due to its versatility the G-Rex3™ supports diverse tool applications and flexible customizable configurations, including single and dual arm, single and dual blade end-effectors, and vacuum or edge hold support.


  G-Rex 3 v.1 G-Rex 3 v.2
Wafer Size up to 450mm up to 450mm
Arm Configuration(s) 2 Link: 5.25"-5.25;
2 Link: 7-25"-7.25";
3 Link: 4"-8"-4"
End Effectors Types Vacuum, Edge-Gripping, Gravity Vacuum, Edge-Gripping, Gravity
Wafer Mapping reflective; through-beam Through-beam at the back side of the EE
Physical Properties    
Size (Diameter/Length) 9.76" (body DIA) and 30.25" 9.8"/20.94"
vert. stroke - body height 7" - 13.6"
12" - 18.6"
17" - 23.6"
20" - 26.6"
NA (Grey)
Axes 3 - T, R, Z 3 - T, R, Z
Range of Motion T: 500°
- 5.25'-5.25': [-10.41 - 10.41]
- 7.25'-7.25': [-14.5", 14.5"]
- 4"-8"-4": [-16", 16"]
Z: 7"; 12"; 17"; 20"
T: 500°
R: [-10.41 - 10.41]
Z: [10.7"]
Payload (Dynamic/Static) 2 lbs 2 lbs
Repeatability T: +/- 0.01°
R: +/- 0.001"
Z: +/- 0/001"
T: +/- 0.01°
R: +/- 0.001"
Z: +/- 0/001"
Cleanliness ISO Class 1 Compatible ISO Class 1 Compatible
Wafer Contact Material Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel
Standards Compliance    
Applicable Directives/Standards Machine Directive 89/392/EEC
89/336/EEC (EMC)
Machine Directive 89/392/EEC
89/336/EEC (EMC)
Standards to Verify Compliance EN 55011
EN 50082-1
EN 60204-1
EN 55011
EN 50082-1
EN 60204-1
Reliability per SEMI E10 >15M MCBF >15M MCBF

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance    with the SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication interface: RS232, Ethernet (optional).