Product Highlight

GPR-GB8-SM Robot System (300/450mm)


  • Minimized idle–time of the process modules due to quicker wafer-swap
  • Fast linear motion of the transport arm eliminates the need of a track
  • Capability to predefine the direction of the linear motion eliminates the need of precise aligning of robot in regard with the source and process modules
  • Patented GPR technology allows deflection compensation and easies the alignment of the pick/place positions
  • Through-beam scanning capability
  • Vacuum or Edge Gripping End Effector
  • Advanced motion planning and axes coordination

GPR-GB8-SM Robot System (300/450mm)

The GPR-GB8-SM is a precise high-performance dual arm robot for automated transport applications of 300mm and 450mm wafers.

The combination of global linear motion of the two-links arm (R-axis) and rotation (Y-axis) of two swapping arms (A1 and A2 axes) ensure optimal handling of up to 4 in-line FOUPs, and dimensionally equivalent process modules, without the need to mount the robot on linear track component.

The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.

Advanced robot motion planning algorithms assures smooth robot motion and fast swapping of wafers at the process positions and wafer carriers.


Wafer Size up to 450mm
Arm Configuration(s) Option 1:O
One Global Translation Arm 11.075"-11.075"
Two Swapping Arms: 6.45"-6.45"

Option 2:
One Global Translation Arm 5.95"-11.9"-5.95"
Two Swapping Arms: 5.45"-5.45"
End Effectors Types Arm Configuration 1:
Vacuum or Edge Gripping

Arm Configuration 2:
Vacuum Gripping only
Wafer Mapping through-beam
Physical Properties  
Size (Diameter/Length) 14" body diameter
Axes 8: T, R, Y, A1, A2, Z, Z1, Z2
Range of Motion T: 500°
Global Translation Arms (R axis):
- 2 Link 11.075"-11.075": [-21", 21"]
- 3 Link 5.95'-11.9'-5.95": [-30.6", 30.6"]
Swapping Arms (A1, A2 axes):
- 2 Link 5.45"-5.45": [-10.35', 10.35"]
- 2 Link 6.46"-6.46": [-8.01, 12.3"]
Z: 12.5"
Y: 680°
Payload (Dynamic/Static) 1.5lbs per swapping arm
Repeatability T: +/- 0.01°
R: +/- 0.001"
A1/A2: +/- 0.001"
Z: +/- 0.001"
Y: +/- 0.005°
Cleanliness ISO Class 1 Compatible
Wafer contact Materials Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
Standards to Verify Compliance EN 60204-1:1997
EN 55011
EN ISO 12100-2:2003
RIA R15.06:1999
Reliability per SEMI E10 >15M

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance    with the SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication interface: RS232, Ethernet (optional).