Product Highlight

GPR-GB7S Robot System (300/450mm)
GPR-GB7S Robot System (300/450mm)


  • GPR Technology
  • Alignment free
  • Deflection compensation
  • Roll and pitch axes
  • Optional Yaw or double Yaw-axes
  • Optional multiple end-effector
  • Optional remote Integral pre-aligner
  • Optional scanners with fast and slow scanning modes
  • Multi-segment continuous path control
  • In-line cassette access

GPR-GB7S Robot System (300/450mm)

The GB7S Robot System employs Genmark’s breakthrough and patented GPR™ Technology to achieve the highest level of performance currently available in an automated wafer handler which is capable of handling up to 450mm diameter wafers. The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads. The unique and patented YAW technology feature of the GPR-GB7S Robot System enables it to access in-line process modules, FOUPS and cassettes from a fixed centralized location, and eliminates the need for radial placement of process and other stations around the robot. The GB7 Robot System can have various arm configurations to accommodate a wide range of SMIF/cassettes front-end layouts.


Wafer Size up to 450mm
Arm Configuration(s) 3 Link 6"-12"6"
3 Link 4"-8"-4"
2 Link 8"-8'
End Effectors Types Vacuum, Edge-Gripping, Gravity
Wafer Mapping reflective; through-beam
Physical Properties  
Size (Diameter/Length) 9.96" (body DIA)
Axes 5: T,  R, Z, Z1, Z2
Range of Motion T: 500°
- 6"-12"-6": [-22.8", 22.8"]
- 4"-8"-4"; [-17.1", 17.1"]
- 8"-8": [-22.8", 22.8"]
Z:  17"; 20"
Tilt: 1.5°
Payload (Dynamic/Static) 2.5lbs
Repeatability T: +/- 0.01°
R: +/- 0.001"
Z: +/- 0.001"
Y: +/- 0.005°
Cleanliness ISO Class 1 Compatible
Wafer contact Materials Vespel, Peek, Teflon impregnated anodized AI, Alumina, Stainless Steel
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
Standards to Verify Compliance EN 60204-1
EN 292-1
EN 292-2
Reliability per SEMI E10 >15M

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance    with the SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication interface: RS232, Ethernet (optional).