Genmark’s “wet” process wafer handling robot, the GB4S-W Robot System, offers precision, performance, and reliability. The GB4S-W assures optimal performance and maximum up time of wet process equipment with minimal footprint. The GB4S-W addresses all major concerns such as premature damage of robot’s mechanisms due to moisture/humidity operational conditions associated with wet process applications including CMP and other applications.
The GB4S-W robot features exceptional load carrying capacity, unmatched reliability and low cost of ownership to achieve the highest level of performance available in “wet” environment wafer transport applications. The GB4S-W robot system is available in single and dual wafer configurations and in various reach and vertical stroke combinations.
| Configuration | |
| Wafer Size | up to 300mm |
| Arm Configuration(s) | 7.25" -7.25" |
| End Effectors Types | Vacuum or edge gripping with optional flipping |
| Wafer Mapping | Optional, reflective or through-beam |
| Physical Properties | |
| Size (Diameter/Length) | 9.76" body diameter |
| Axes | T, R, Z, E(optional end effector flipping axis) |
| Range of Motion |
T: 500 degrees R: +/- 14.5" Z: 8" E: 180 degrees |
| Performance | |
| Payload (Dynamic/Static) | 2lbs |
| Repeatability |
T: +/- 0.01 degrees R: +/- 0.001" Z: +/- 0.001" E: +/- 0.01" degrees |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer contact Materials | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2 - 93A |
| Standards to Verify Compliance |
EN 60204-1 EN 292-1 EN 292-2 |
| Reability | |
| Reliability per SEMI E10 | >4.8M |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement.
The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
