Product Highlight

GB4S-W Robot System


  • Special protective robot cover
  • Fast, accurate, repeatable wafer transport
  • DSP-based motion controller for vibration-free wafer transport
  • Proprietary multi-segment continuous path motion control
  • Extended reach and vertical travel combined in a compact package

GB4S-W Robot System

Genmark’s “wet” process wafer handling robot, the GB4S-W Robot System, offers precision, performance, and reliability. The GB4S-W assures optimal performance and maximum up time of wet process equipment with minimal footprint. The GB4S-W addresses all major concerns such as premature damage of robot’s mechanisms due to moisture/humidity operational conditions associated with wet process applications including CMP and other applications.

The GB4S-W robot features exceptional load carrying capacity, unmatched reliability and low cost of ownership to achieve the highest level of performance available in “wet” environment wafer transport applications. The GB4S-W robot system is available in single and dual wafer configurations and in various reach and vertical stroke combinations.


Wafer Size up to 300mm
Arm Configuration(s)  7.25" -7.25"
End Effectors Types   Vacuum or edge gripping with optional flipping
Wafer Mapping Optional, reflective or through-beam
Physical Properties  
Size (Diameter/Length) 9.76"  body diameter
Axes T, R, Z, E(optional end effector flipping axis)
Range of Motion T:  500 degrees
R: +/- 14.5"
Z:  8"
E:  180 degrees
Payload (Dynamic/Static) 2lbs
Repeatability T: +/- 0.01 degrees
R: +/- 0.001"
Z: +/- 0.001"
E: +/- 0.01" degrees
Cleanliness ISO Class 1 Compatible
Wafer contact Materials Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
89/336/EEC (EMC)
SEMI S2 - 93A
Standards to Verify Compliance EN 60204-1
EN 292-1
EN 292-2
Reliability per SEMI E10 >4.8M

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance with SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.  
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement.
The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications.

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication Interface: RS232, Ethernet (optional).