Product Highlight

GB4P Robot System


  • Integrated Pre-Aligner Module
  • Adjustable lighthouse for wafers ranging in 2"-8" in diameter
  • Fast, accurate, repeatable transport of wafers, and photomasks
  • Extended reach and vertical travel options
  • DSP-based motion controller for vibration-free wafer transport
  • Multi-segment continuous path control
  • Optional scanning feature with fast and slow scanning mode
  • Optional scanning feature with fast and slow scanning mode

GB4P Robot System

The GB4P Robot System with integral wafer pre-aligner is the most compact robot and pre-aligner package available on the market today for wafer handling applications up to 200mm, standard payload and throughput.

Identical in size to Genmark’s original GB4 robot, the GB4P houses a built-in pre-aligner for wafers ranging from 2"- 8" in diameter. The adjustable feature on the pre-aligner allows for simple and fast configuration for different wafer sizes. Engineered for single or dual wafer transport, the GB4P robot is available with an extensive variety of reach and vertical stroke combinations.

Genmark's GB4P Robot System is a highly accurate, repeatable, and reliable wafer handling and aligning solution for wafer sizes up to 200mm.


Arm Configuration(s) 5.25"-5.25"; 7.25" -7.25"; 4"-8"-4"
End Effectors Types Vacuum, Edge-Gripping, Gravity
Wafer Mapping reflective; through-beam
Physical Properties  
Size (Diameter/Length) 9.76" (body DIA)
vert. stroke - body height 7" - 13.5"
8.5" - 14.3"
12" - 17.85"
17" - 23.5"
20" - 26.5"
Axes 5:
Robot - T, R, Z
Prealigner - V (vertical), P (chuck rotation)
Range of Motion T: 500°
- 5.25"-5.25": [-10.5", 10.5"]
- 7.25"-7.25"; [-14.5", 14.5"]
- 4"-8"-4": [-16", 16"]
Z: 7"; 8.5"; 12"; 17"; 20"
Payload (Dynamic/Static) 2lbs
Repeatability T: +/- 0.01°
R: +/- 0.001"
Z: +/- 0.001"
Cleanliness ISO Class 1 Compatible
Wafer contact Materials Vespel, Peek, Teflon impregnated anodized AI, Alumina, Stainless Steel
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
Standards to Verify Compliance EN 60204-1
EN 292-1
EN 292-2
Reliability per SEMI E10 >15M MCBF

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance    with the SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication interface: RS232, Ethernet (optional).