Product Highlight

EVTMHS Extended Vertical Travel Robot System


  • Belt-less transmission design
  • Reduced weight
  • Improved stiffness
  • Serviceability, manufacturability, and reliability built into design:
  • Improved manufacturing assembly: <2hr.
  • Time to repair in the field: <1hr.
  • Utilizes components with highest tested reliability.

Software Highlights:

  • Fully coordinated motions
  • Advanced motion profiling and blending
  • Beam-based wafer centering on-the-fly
  • Multiple point boat teaching
  • Modular attachment/detachment of mechanical sub-systems.


  • Operating temperature range: 20 degrees C to 55 degrees C.
  • Storage temperature range: 20 degrees C to 60 degrees C.
  • Atmosphere: CDA (80% N2) up to 100% Nitrogen.
    No silicone materials to be used anywhere within the system.
    No plastics that rely on their hydroscopic properties to provide a lower coefficient of friction (Nylon) are allowed.
  • Humidity: 0% to 60% operating, 0% to 95% non-condensing stored.

EVTMHS Extended Vertical Travel Robot System

The EVTMHS is a wafer handling system with extended vertical travel designed to transport 300mm and 450mm wafers in semiconductor manufacturing tools that require large work envelope solutions.

The system can also handle 200 mm wafers without any hardware changes. While for wafer sizes below 200 mm, the robot End-Effector has to be reconfigured. The time that this reconfiguration takes is usually less than an hour including the time needed to teach all the pickup positions. Thus, the average teaching time of 45 minutes (for pickup locations) can be achieved thanks to the sophisticated autoteach routines provided by the system firmware.

The optional through beam mapping sensor allows for reliable detection of normally inserted, cross-slotted, or double-slotted wafers in FOUPs and boats. Depending on the chosen arm configuration the system can access one or two in-line Semi standard FOUPs. From the operational point of view, the system is fully integrated and controlled by a single controller.


Wafer Size up to 450mm
Arm Configuration(s) 7-25"-7.25"
End Effectors Types Vacuum, Edge-Gripping, Gravity
Wafer Mapping Reflective; through-beam
Physical Properties  
Size (Diameter/Length) 11.7" (length)
Axes 3 – T,R,Z.
Range of Motion T: 500°
R: [-14.25", 14.25"]
Z: 40.57"
Payload (Dynamic/Static) 2 Lb
Repeatability T: +/- 0.01°
R: +/- 0.001"
Z: +/- 0.001"
Cleanliness ISO Class 1 Compatible
Wafer contact Materials Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEc
89/336/EEC (EMC)
Standards to Verify Compliance EN 60204-1:1997
EN 55011
EN ISO 12100-2:2003
RIA R15.06:1999
Reliability per SEMI E10 >15M MCBF

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance    with the SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication interface: RS232, Ethernet (optional).