The Remote Pre-Aligner (RPA) is an intelligent robot add-on, providing accurate and non-contact measurement of the eccentricity and the orientation of substrate placement. It is designed to be seamlessly integrated with Gencobot series 4, 7, 8, and GPR-SM when substrate alignment is required by the material handling application.
The device can be arbitrarily placed inside the robot's working envelope. It can be configured with several vertical travel-ranges or without any vertical motion at all. The substrate can be placed on a chuck or on optional resting pins of the pre-aligner, depending on the shape of the robot's end-effector.
The operation of the pre-aligner includes a measurement of the wafer displacement, calculation of the necessary compensation, and orientation of the notch (or the flat) to the desired angle. After the orientation is completed, the robot picks the wafer with necessary offset compensation. In order to maximize the system throughput, the controller allows simultaneous operation of the pre-aligner and the robot - while the wafer is being measured, the robot can perform other tasks.
The RPA is designed for use in a wide range of applications regardless of the size, shape, transparency, and thickness of the substrates that are to be aligned. The custom-designed lighthouse provides accurate and reliable measurement of both solid and transparent objects. The built-in optics allow for substrate thickness as much as 6mm. The pre-aligner can measure wafers with diameters ranging from 50 to 300mm and square substrates from 75 to 200mm. An optional moving lighthouse provides software-controlled adjustment to the different substrate sizes.
| Works with | Wafer, reticle |
| Wafer size | 2", 3", 3100mm, 125mm, 150mm, 200mm, 300mm |
| Flat or Notch Orientation | Flat, Notch |
| Alignment Accuracy | |
| Center Offset | 0.002" |
| Angular Offset | 0.1 degrees |
| Alignment time | 5 sec |
| Initial Offset Allowance | 0.5" |
| Servo Light-house Gap | 0.35", 0.5" |
| Maximum Vertical Velocity | 20"/s |
| Maximum Vertical Acceleration | 40"/s2 |
| Physical Properties | |
| Vertical travel-body height |
8.5" - 14" 13"- 18.5 16" – 25.35 |
| Length | 12.3" |
| Width | 3.4" |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204- 1:1997 EN ISO 12100- 2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 / MCBF | >20M |
