Product Highlight

Request a Product Catalog

Motion Control Components

State of the Art Motion Control Features

  • Control of versatile robotic structures, including "yaw", "pitch" and "roll" motion capabilities
  • S-curve velocity profiling, based on polynomial splines and Bernstein-Bezier curves
  • Continuous path control in multi-segment smooth trajectories
  • Synchronization of multiple axes
  • Trajectory control with user defined velocity profiles
  • Kinematical modeling of open and closed loop mechanisms
  • Singularity consistent path planning and singularity avoidance
  • Optimal PID filter tuning
  • Automatic adjustment with respect to the surrounding equipment (cassettes, process stations, etc.)
  • Tilting capabilities in terms of the end-effector frame
  • Compensation for deflection of the end effector, the manipulated object and geometric in accuracies of the arm Scanning and Aligning Features
  • Wafer mapping based on through-beam or reflective sensors
  • Automatic detection of the planarity and the center of wafers and FPD
  • Non contact FPD aligning. Misalignment compensation on the fly Safety
  • Programmable travel limits
  • Position tracking error detection
  • Amplifier overload protection
  • Emergency stop

© 2011 - Genmark Automation, Inc. All rights reserved.