Product Highlight

SortMax300 HT<span class='small-trade'>™</span>
SortMax300 HT<span class='small-trade'>™</span>
 

SortMax300 HT

Genmark’s SortMax300 HT™ is capable of achieving the highest wafer per hour throughput requirements while operating under strict reliability and cleanliness specifications. Based on modular design it can support configurations up to 8 FOUP/FOSB stations. Highest throughput capacity is a result of expanded technological features including uniquely designed dual end-effector wafer transfer mechanisms based on Genmark’s proven GREX dual arm robot series.

SortMax300 HT™ also offers highly improved software functionality and reliability based on the latest ECS300 Equipment Control Software suite. Along with rapid set-up, the highly sophisticated software suit has been improved to included built-in support for the latest fab requirements. Special “auto-teach” scripts are included to further simplify the wafer-handler teaching process, optimize operator interface and reduce downtime during maintenance periods.

Genmark's high throughput wafer sorter SortMax300 HT™ is designed for handling up to 300mm wafers and is offered in standard or custom configurations. A wide array of end-effectors, wafer mappers and single or dual wafer aligners are some of its many options.

Specifications

Enclosure  
Base Frame Welded steel, BOLTS compatible load ports
Coating Baked powder coat
Capacity (Stocker) Up to 8 Loadports
Fan Filter  
Fan Filter Unit Per customer specification
Filter Media PTFE ULPA 99.99995% @ 0.1 micro meters efficiency
Wafer Size Up to 300 mm
Automation  
Atmospheric Robot (types) Grex4
End Effector (types) Vacuum gripping, Edge gripping
Pre-Aligner types Vacuum gripping chuck; edge gripping chuck
Wafer Mapping Through-beam
User Interface Keyboard, mouse, touch screen
Software Interface SEMI E30, E84, E87, E90, E40, E94, E99, E118, E116
Communications RS232 (SECS-I), Ethernet (HSMS)
Physical Properties  
Length Two load ports – 45"
Three load ports – 66"
Four load ports – 80"
Air Pressure: Relative to Cleanroom Ambient
Port closed Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13Pa)
Load/Unload Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13Pa)
ME Recovery time < 38 sec
Air Flow Velocity 90 +/- 10% ft/min, (0.45 +/- 10% m/sec)
Standards Compliance  
SEMI -    SEMI S1-0701
-    SEMI S2-1102
-    SEMI S7-96
-    SEMI S8-0701
-    SEMI S9-1101
-    SEMI S10-1296
-    SEMI S13-0298
-    SEMI E15-0698
-    SEMI E44-96
-    SEMI E54-0997
-    SEMI E58-0301
-    SEMI F47-0400
Other Standards CE Standards, International Sematech Integrated Minienvironment Best Design Practices.
Environment  
Cleanliness Class 1000 or better