Genmark's SortMax300™ is a next generation SORTER producing the highest throughput rapid software set-up and lowest cost-of-ownership culminating from 25 years' experience in design, development, and manufacture of wafer handling equipment.
High throughput is achieved using Genmark’s high precision robots, including the robot series featuring the patented GPR technology robots enabling automatic compliant interaction with misaligned process modules and capable of deflection compensation during transport of high payloads.
The SortMax300™ is designed for handling up to 300mm wafers and reticles, and can be customized to accommodate any mix of cassettes and FOUPS in 1 to 5 BOLTS compatible load station configurations. The SortMax300™ features a better than ISO Class 1-mini-environment while maintaining the smallest footprint in its class.
Genmark’s ECS300 Equipment Control Software is a standard feature, featuring operational functions such as Sort, ID, Transfer, Compress, Align and Merge/Split.
| Enclosure | |
| Base Frame | Welded steel, BOLTS compatible load ports. |
| Coating | Baked powder coat |
| Fan Filter | |
| Fan Filter Unit | Per customer specification |
| Filter media | PTFE ULPA 99.99995% @ 0.1 micro meters efficiency |
| Wafer size | up to 300mm |
| Automation | |
| Atmospheric Robot (types) | Grex; GB4S; GB7S; GB8; GB8SM; |
| End Effector (types) | Vacuum gripping, Edge gripping, Gravity |
| Pre-Aligner (types) | Vacuum gripping chuck; edge gripping chuck |
| Wafer Mapping | Through-beam |
| User Interface | Keyboard, mouse, touch screen |
| Software Interface | SEMI E30, E84, E87, E90, E40,E94, E99, E118, E116 |
| Communications | RS232 (SECS-1), Ethernet (HSMS) |
| Physical Properties | |
| Length |
Two load ports - 45'' Three load ports - 66'' Four load ports - 80'' |
| Air Pressure: Relative to Cleanroom Ambient | |
| Port Closed | Spec: 0.01 +/- 0.005 inches w.c. (2.5 +/-0.13 Pa) |
| Load/Unload | Spec: 0.01 +/- 0.005 inches w.c. (2.5 +/-0.13 Pa) |
| ME Recovery time | <38 sec |
| Air flow velocity | 90 +/- 10% ft/min, (0.45 +/-10% m/sec) |
| Standarts Compliance | |
| SEMI |
-SEMI S1-0701 -SEMI S2-1102 -SEMI S7-96 -SEMI S8-0701 -SEMI S9-1101 -SEMI S10-1296 -SEMI S13-0298 -SEMI E15-0698 -SEMI E44-96 -SEMI E54-0997 -SEMI E57-0600 -SEMI E58-0301 -SEMI F47-0400 |
| Other Standards | CE standards, International Sematech Integrated Minienvironmental Best Design Practices. |
| Environment | |
| Cleanliness | Better than Class 1 |
