Genmark Automation continually strives to develop new products and technologies and holds numerous patents in the industry.
A substrate handling system is provided with a robot having the dual function of a removing and replacing substrate-containing pod doors and load lock chamber doors, and of transporting the substrates between the pods and various processing stations. The robot is equipped with an end effector having sockets into which interchangeable tools for implementing the various functions are removably mounted.
Automatic Opening and Closing Ultraclean Storage Containers Patent
PDF Format: 0.99 MB
A robotic arm comprises a plurality of sequentially pivotally attached links. The proximal end portion of the links is pivotally mounted to a relatively static structure. An end effector structure has two substantially oppositely extending hands each capable of picking up a workspace.
Dual EE Robotic Arm Patent
PDF Format: 788 KB
An improvement is set forth in a robotic arm structure which includes at least two links. Q motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R motion proceeds radially from the primary axis whereby the distal end portion of the distalmost of the links can be moved in a radially extending straight line.
Dual Robotic Arm EE Having Yaw Motion Patent
PDF Format: 2.76 MB
A vertical positioner comprises a rigid frame. A rigid vertically extending structure extends upwardly from a base to its upper end portion. A generally horizontal flange forms the structure upper end portion. It has a central opening and at least two peripheral opening.
Highly Stable Z-Axis Drive Patent
PDF Format: 354 KB
A semiconductor processing robot is provided with a robot arm on which is mounted an integrated edge gripper having an orienting assembly and a detecting assembly. The orienting assembly operates to rotate a substrate such that a substrate reference making, or indicium, is positioned at the detecting assembly.
Integrated Edge Gripper Patent
PDF Format: 432 KB
A planarity teaching station includes one or more proximity sensors arranged to reflect light off a surface to determine a plane i which a substrate is positioned by a robotic arm. The plane of the substrate is then automatically adjusted by changing a Z-axis of a universally tiltable robot base or in another manner, based on the data provided by the planarity teaching station.
Prealigner and Planarity Teaching Patent
PDF Format: 696 KB
An arm structure includes either two or three links pivotally connected to one another with a hand or end effector at the distal end of the distal link. Straight line movement of the pivoting mounting place of the end effector is provided from a rotating drive wheel coaxial with the pivoting of the proximal end of the proximal link.
Precision Arm Mechanism Patent
PDF Format: 1.07 MB
A robotic arm mechanism provides motion to an end essector via a motor driving a drive pulley. The drive pulley is connected by a belt structure to drive a driven pulley. The motor is mounted to a bracket. The bracket is slidably mounted to a base plate. The bracket is positioned relative to the base plate to provide desired tension in the belt structure.
Robot Arm Motor Stabilizer Patent
PDF Format: 372 KB
A substrate handling system comprises a robot containing micro-environment in communication with a plurality of processing stations. The robot has a robot arm comprising an end effector linkage mounted to an extensible linkage.
Robot Having Independent Linkage Motion Patent
PDF Format: 521 KB
An improvement is set forth in a robotic arm structure which includes at least two links. Q motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R motion proceeds radially from the primary axis whereby the distal end portion of the distalmost of the links can be moved in a radially extending straight line.
Robot Having Multiple DOF Patent
PDF Format: 2.94 MB
An article positioning apparatus which includes a positioning arm structure on a rigid base structure and elevator structure. The base structure includes an upper flange and a lower flange secured to the upper flange by rigid members extending between the upper flange and the lower flange.
Robot Having Multiple DOF in Isolated Environment Patent
PDF Format: 914 KB
An improvement is set forth in a robotic arm structure which includes at least two links. Q motion ia provided about a primary axis at the proximal end portion of the proximalmost of the links. R motion proceeds radially from the primary axis whereby the distal end portion of the distalmost of the links can be moved in a radially extending straight line.
Robot Having Multiple DOF Patent
PDF Format: 2.76 MB
Motion of a substrate-transporting robot arm is controlled in order to compensate for inaccuracies and deflections encountered during operation. The compensation is effected by synchronizing elevational and planar motions of the robot arm such that the trajectory of the substrate ia made coincident with the object axis of the sudstrate. The substrate may be a semiconductor wafer, an LCD panel or an end effector of the robot arm.
Robot Motion Compensation System Patent
PDF Format: 134 KB
An apparatus provides Q-rotational motion about a Z-axis. The apparatus is improved as follows. A stop structure is carried by the apparatus and rotates with it. The stop structure has a detent engagement structure. A detent structure comprises a rotatable member located adjacent to the stop structure. The rotatable member is mounted for free rotation about an axis parallel to the Z-axis.
Robotic Arm Rotation Controller Patent
PDF Format: 393 KB
The broken line showing is for illustrative purposes only and forms no part of the claimed design.
Robotic Arm Patent
PDF Format: 96.7 KB
A uni-directional tilt mechanism for supporting a robotic arm mechanism or other structures includes a simplified system of two motors for tilting a support platform in one dimension. The uni-directional tilt platform according to the invention may be stacked to provide a universally tiltable stacked platform system for supporting a robotic arm mechanism.
Tiltable Z-Axis Platform Patent
PDF Format: 1.05 MB
A tilting elevator is set forth. A rigid frame has a base, a structurally rigid structure extending upwardly from the base, and a flange attached to the structure top. The flange is generally parallel to the base. A movable elevatable structure is telescopically mounted to the rigid frame. The elevatable structure comprises upper and lower spaced apart generally parallel plates.
Universaly Tiltable Z-Axis Drive Patent
PDF Format: 728 KB
