GPR™ Vacuum Elevator

The GPR™ Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment. The GPR™ Vacuum Elevators feature Genmark Automation’s breakthrough GPR™ technology, allowing a tilt of up to 1.5 degrees of the lifting platform. The GPR™ Vacuum Elevator provides vertical indexing with 16” [406 mm] travel, and it is capable to lift a load of up to 50 lb. Elevator translational mechanism is isolated from the atmospheric environment by using Ferrofluidic and magnetically-coupled seals.

Features:

• Precise, high-resolution wafer indexing
• Cost-effective, seamless integration with the Genmark Automation Vacuum Robots
• HV-compatible – up to 10^-8 torr
• Patented GPR technology

Product Specification

• Maximum Vacuum: 10E-10 Torr
• Lifting Platform type: GPR™
• Number of platforms: 1
• Number of servo controlled axes: 3
• Maximum vertical stroke: 16” [406mm]
• Maximum tilt angle: 1.5 degrees
• Resolution: 6.6E-6” [0.00017mm]
• Maximum speed: 5”/sec
• Maximum acceleration: 5”/sec²
• Repeatability: 0.001”
• Payload: 50 lbs
• Cleanliness: Class 1
• Surface treatment/material: aluminum, stainless steel
• Elevator weight: 150 lb [58.2 Kg]