GB9

Vacuum Robot Featuring GPR™ Technology

The Gencobot 9 Vacuum Robot (GB9) is one of the latest additions to Genmark Automation’s GPR™ line of precision transport robotics. The GB9 provides accurate, repeatable indexing and transportation of semiconductor wafers in vacuum processing capital equipment down to 10^-8 Torr. This robot features Genmark Automation’s breakthrough GPR™ System to achieve the highest level of performance currently available in a 300 mm compatible vacuum wafer/FPD handler. The GPR™ System, using Genmark Automation’s patented technology, is a five-degree of freedom servo controlled robot that can compliantly interact with misaligned cassettes and process modules, as well as deliver deflection compensation during transport. The GB9 is available with various arm options, allowing for the robot to transport a wide array of wafers, FPD’s and photo-masks over an extended radial reach. The standard GB9 is available with vertical stroke options of 3" and 6".

Features

Specifications

• Arm Configurations - 10.5" - 10.5", 12.5" - 12.5"

• Maximum reach
  Two-Link Arm (10.5”-10.5”) - 42”
  Two-Link Arm  (12.5”–12.5”) - 50"

• Maximum vertical stroke - 3", 6"

• Maximum velocity:
 T = 500 ° /sec
 R = 60 "/sec
 Z = 5"/sec

• Maximum acceleration:
 T = 500 °/sec²
 R = 100"/sec²
 Z = 5"/sec²

• Minimum work envelope:(Equipped with 12.5"-12.5" arm and 12" end-effector)
 200/300 mm: D = 30"

• Repeatability (R,T,Z):
 T = ± 0.01°
 R = ± 0.001"
 Z = ± 0.001"

• Max wafer sizes: 300 mm

• Robot weight - 150 lb

• Payload capacity: 25 lbs.