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AVR-3000
Advanced Vacuum Robot
A member of the vacuum family of transport systems, the AVR-3000 provides highly
precise, repeatable wafer transportation in ultra-clean high-vacuum processing
capital equipment. The AVR-3000 is operable down to 10E-10 Torr with minimal
chamber pump down time post robot installation. Incorporating the latest
technology into the arm and transmission design guarantees zero backlash after
the inevitable collision with the occasionally "overactive" gate
valve. This translates into immediate recovery without having to re-teach the
robot. The AVR-3000 is available with various end-effector options allowing
the robot to transport a wide array of wafers, FPD's and photomasks over an
extended radial reach.
Features
- DSP-based motion control for vibration – free wafer transport
- Less than class 1 clean room compatible
- Radial cassettes / process chambers access capabilities
Product Specifications
| Arm Configurations |
Motion Range |
Maximum Velocity |
Maximum Acceleration |
| T-axis** |
R-axis |
Z-axis |
T-axis |
R-axis |
Z-axis |
T-axis |
R-axis |
Z-axis |
2 Link 10.5"-10.5"
(266.7-266.7
mm) |
500° |
21"
(533.4
mm) |
1"
(25.4
mm) |
132°/s |
15"/s
(381
mm/s) |
10"/s
(254
mm/s) |
270°/s² |
30"/s²
(762
mm/s²) |
20"/s²
(508
mm/s²) |
| Arm Configurations |
Resolution |
Repeatability |
Diameter of the Minimum Working Envelope* |
Max. Wafer Size |
Robot Weight |
Payload |
| T-axis |
R-axis |
Z-axis |
T-axis |
R-axis |
Z-axis |
2 Link 10.5"-10.5"
(266.7-266.7
mm) |
0.0007° |
0.000122"
(0.0031
mm) |
0.000007"
(0.00018
mm) |
+/-0.01° |
+/-0.001"
(+/-0.0254
mm) |
+/-0.001"
(+/-0.0254
mm) |
25.8"
(655.3
mm) |
300mm |
96 lb
(43.6
kg) |
5 lb
(2.27
kg) |
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