 |
|
|
|
AVR-2000
A member of the vacuum family of transport systems, the AVR-2000 provides highly precise, and reliable transportation in ultra-clean, high-vacuum processing environment.
Special kinematics and motion transmitting design guarantee fast motion of the arm, zero backlash, and robustness against excessive external forces, applied to the links. Advanced motion coordination over multi-segment trajectories
with overlapping velocity profiles guarantees smooth and effective material transfer. The AVR-2000 has 0.5" vertical travel and is available with various end-effector options, allowing the robot to transport
a wide array of wafers, photo-masks, FPD's over an extended radial reach.
Features
- Ultra High Vacuum compatible (to 10E-10 Torr)
- Less than class 1 clean room compatible
- DSP-based motion control for fast, vibration free material transport
| Arm Configurations |
Motion Range |
Maximum Velocity |
Maximum Acceleration |
| T-axis** |
R-axis |
Z-axis |
T-axis |
R-axis |
Z-axis |
T-axis |
R-axis |
Z-axis |
2 Link 8"-8"
(203.2-203.2
mm) |
306° |
31"
(787.4
mm) |
0.5"
(12.7
mm) |
132°/s |
15"/s
(381
mm/s) |
10"/s
(254
mm/s) |
270°/sē |
30"/sē
(762
mm/sē) |
20"/sē
(508
mm/sē) |
| Arm Configurations |
Resolution |
Repeatability |
Diameter of the Minimum Working Envelope* |
Max. Wafer Size |
Robot Weight |
Payload |
| T-axis |
R-axis |
Z-axis |
T-axis |
R-axis |
Z-axis |
2 Link 8"-8"
(203.2-203.2
mm) |
0.0017° |
3.0E-4"
(0.0076
mm) |
5.1E-05"
(0.0014
mm) |
+/-0.01° |
+/-0.001"
(+/-0.0254
mm) |
+/-0.001"
(+/-0.0254
mm) |
18"
(508
mm) |
300mm |
56 lb
(25.4
kg) |
5 lb
(2.27
kg) |
* The minimum working envelope is calculated for the maximum wafer size for the particular robot, 8.5" (215.9mm) long end-effector.
** Dependent on the maximum extension/retraction of the arm
|
|
©
Genmark Automation, Inc. All rights reserved. Home | Contact
