The GPR™ Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment. The GPR™ Vacuum Elevators feature Genmark Automation’s breakthrough GPR™ technology, allowing a tilt of up to 1.5 degrees of the lifting platform. The GPR™ Vacuum Elevator provides vertical indexing with 16” [406 mm] travel, and it is capable to lift a load of up to 50 lb. Elevator translational mechanism is isolated from the atmospheric environment by using Ferro fluidic and magnetically-coupled seals.
The patented GPR technology enables the servo-controlled mechanisms to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.
| Configuration | |
| Wafer Carrier Type | Wafer Cassettes and boats |
| Physical Properties | |
| Size (Diameter) | 14.125" |
| Body Height |
14.9" travel - 23.1" 16" travel - 25" |
| Axes | 3: Z, Z1, Z2 |
| Range of Motion | Z: 14.9", 16" |
| Performance | |
| Payload | 50 lb |
| Base Operating Pressure | 10E-10 Torr |
| Leak rate | <1*10E-9 std cc/sec |
| Repeatability | |
| Vertical ( Z ) | 0.001" |
| Reliability (MTBF) | >80,000 hours |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer contact Materials | Aluminum, SS, Viton, Vacuum Grease |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 | >14M MCBF |
