Product Highlight

GPR<span class='small-trade'>™</span>  Vacuum Elevator
GPR<span class='small-trade'>™</span>  Vacuum Elevator
GPR<span class='small-trade'>™</span>  Vacuum Elevator


  •     Precise, high-resolution wafer indexing
  •     Cost-effective, seamless integration with the Genmark Automation Vacuum Robots
  •     HV-compatible – up to 10-8 torr
  •     Patented GPR technology

GPR Vacuum Elevator

The GPR™ Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment. The GPR™ Vacuum Elevators feature Genmark Automation’s breakthrough GPR™ technology, allowing a tilt of up to 1.5 degrees of the lifting platform. The GPR™ Vacuum Elevator provides vertical indexing with 16” [406 mm] travel, and it is capable to lift a load of up to 50 lb. Elevator translational mechanism is isolated from the atmospheric environment by using Ferro fluidic and magnetically-coupled seals.

The patented GPR technology enables the servo-controlled mechanisms to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.


Wafer Carrier Type Wafer Cassettes and boats
Physical Properties  
Size (Diameter) 14.125"
Body Height 14.9" travel - 23.1"
16" travel - 25"
Axes 3:  Z, Z1, Z2
Range of Motion Z: 14.9", 16"
Payload 50 lb
Base Operating Pressure 10E-10 Torr
Leak rate <1*10E-9 std cc/sec
Vertical ( Z ) 0.001"
Reliability (MTBF) >80,000 hours
Cleanliness < Class 1 Clean Room Compatible
Wafer contact Materials Aluminum, SS, Viton, Vacuum Grease
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
Standards to Verify Compliance EN 60204-1:1997
EN ISO 12100-2:2003
RIA R15.06:1999
Reliability per SEMI E10 >14M MCBF