Load Port Modules: FOUP and OCA
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Genmark Automation’s Porta FOSB ™ is versatile load port specifically designed for 300mm Front Opening Storage Boxes (FOSB).
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Genmark Automation's Porta R5 ™ is a BOLTS compatible load port specifically designed for automated reticle loading.
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Genmark Automation's Porta R6™ is a BOLTS compatible load port specifically designed for automated reticle loading.
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The Genmark’s Open Cassette Adapter (OCA) is an option for our load-ports tools that allows order-technology open wafer cassettes on newer tools
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The Porta300™ plus is an advanced load port for 300mm wafer carriers.
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