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GPR-GB7-W Robot System (300/450mm)
 

GPR-GB7-W Robot System (300/450mm)

GPR-GB7-W Robot System is designed with sealed mechanisms to prevent internal damage due to exposure to wet environments associated with automation of CMP and other process applications requiring materials handling under wet conditions. 

The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.

Specifications:

Configuration  
Wafer Size up to 450mm
Arm Configuration(s) 3 Link 6"-12"-6"
2 Link 5.25"-5.25"
End Effectors Types Vacuum, Edge-Gripping, Gravity
Wafer Mapping Reflective; through-beam
Physical Properties  
Size (Diameter/Length) 9.8" (body DIA)
Z travel - body height 8" travel - 18"
12.5" travel - 21"
17" travel - 24.5"
20" travel - 27"
Axes 5: T, R, Y, Z, Z1, Z2
Range of Motion T: 500°
R:
-    6"-12"-6": [-22.8", 22.8]
- 5.25"-5.25": [-9.975", 9.975"]
Z: 8", 12.5", 17", 20"
Tilt: 1.5°
Performance  
Payload (Dynamic/Static) 2.5lbs
Repeatability T: +/- 0.01°
R: +/- 0.001"
Z: +/- 0.001"
Environment  
Cleanliness ISO Class 1 Compatible
Wafer contact Materials Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
89/336/EEC(EMC)
SEMI S2-93A
Standards to Verify Compliance EN 60204-1:1997
EN 55011
EN ISO 12100-2:2003
RIA R15.06:1999
Reliability  
Reliability per SEMI E10 >15M

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance    with the SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication interface: RS232, Ethernet (optional).