The GPR-GB7-TL Telescopic Robot extends the GB7’s effective work envelop to a maximum vertical displacement of 40” and features Genmark’s GPR and YAW patented technologies to achieve the highest level of performance currently available in an automated wafer handler-capable of handling up to 450mm wafers.
The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads..
The unique multi-platform feature of GPR-GB7Y-TL robot doubles the normal vertical stroke limit. Its yaw-axis feature can replace a track system for a variety of in-line processing applications. The GB7-TL and GB7Y-TL can be fitted with various arm and end-effector configurations to be integrated in a wide range of front-end and other tool layouts. The robot is available in 2 or 3 telescopic platform configurations.
| Configuration | |
| Wafer Size | up to 450mm |
| Arm Configuration(s) | 3 Link 6"-12"-6" |
| End Effectors Types | Vacuum, Edge-Gripping, Gravity |
| Wafer Mapping | Reflective; through-beam |
| Physical Properties | |
| Size (Diameter/Length) | 22.8" (body DIA) |
| Axes | 12: T, R, Y, Z, Z1, Z2, L, L1, L2, B, B1, B2 |
| Range of Motion |
T: 500° R: - 6"-12"-6": [-22.8", 22.8] Z: 40" (complex axis, Z+L+B) Y: 344° Tilt: 1.5° |
| Performance | |
| Payload (Dynamic/Static) | 2.5lbs |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer contact Materials | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN 55011 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 | >15M MCBF |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
