The GB4S Robot System is a high precision 300mm wafer handling robot that offers superior performance for tool automation applications requiring standard payload and throughput requirements.
Identical in size to Genmark’s original GB4 robot, the GB4S features many design enhancements that result in improved robot performance and reliability. Engineered for single or dual wafer transport, the GB4S robot is available in various reach and vertical stroke combinations.
The GB4S Robot System used in conjunction with the RPA-0 Remote Pre-aligner, provides a highly accurate, highly repeatable pre-alignment and transport system for wafers and reticles. It includes the handling of “thin wafers” through specially designed end-effector paddles and aligner chucks, lifting pins, along with dedicated motion control software, to assure reliable material handling while overcoming increased wafer sag and fragility. The option of a flipping end-effector is also available.
| Configuration | |
| Wafer Size | up to 300mm |
| Arm Configuration(s) | 5.25"-5.25"; 7.25" -7.25"; 4"-8"-4" |
| End Effectors Types | Vacuum, Edge-Gripping, Gravity |
| Wafer Mapping | reflective; through-beam |
| Physical Properties | |
| Size (Diameter/Length) | 9.76" (body DIA) and 30.25" |
| vert. stroke - body height |
7" - 13.6" 12" - 18.6" 17" - 23.6" 20" - 26.6" |
| Axes | 3 - T, R, Z |
| Range of Motion |
T: 500° R: - 5.25"-5.25": [-10.5", 10.5"] - 7.25"-7.25"; [-14.5", 14.5"] - 4"-8"-4": [-16", 16"] Z: 7"; 12"; 17"; 20" |
| Performance | |
| Payload (Dynamic/Static) | 2lbs |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer contact Materials | Vespel, Peek, Teflon impregnated anodized AI, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1 EN 292-1 EN 292-2 |
| Reability | |
| Reliability per SEMI E10 | >15M MCBF |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
