Product Highlight

GB4S Robot System
 

Features

  • Fast, accurate, repeatable transportation of wafers, and photomasks
  • Extended reach and vertical travel combination
  • Extended rotation motion range
  • DSP-based motion controller for vibration- free wafer transport
  • Multi-segment continuous path control
  • Optional scanning feature with fast and slow scanning mode

GB4S Robot System

The GB4S Robot System is a high precision 300mm wafer handling robot that offers superior performance for tool automation applications requiring standard payload and throughput requirements.

Identical in size to Genmark’s original GB4 robot, the GB4S features many design enhancements that result in improved robot performance and reliability. Engineered for single or dual wafer transport, the GB4S robot is available in various reach and vertical stroke combinations.

The  GB4S Robot System used in conjunction with the RPA-0 Remote Pre-aligner, provides a highly accurate, highly repeatable pre-alignment and transport system for wafers and reticles. It includes the handling of “thin wafers” through specially designed end-effector paddles and aligner chucks, lifting pins, along with dedicated motion control software, to assure reliable material handling while overcoming increased wafer sag and fragility. The option of a flipping end-effector is also available.

Specifications:

Configuration  
Wafer Size up to 300mm
Arm Configuration(s) 5.25"-5.25"; 7.25" -7.25"; 4"-8"-4"
End Effectors Types Vacuum, Edge-Gripping, Gravity
Wafer Mapping reflective; through-beam
Physical Properties  
Size (Diameter/Length) 9.76" (body DIA) and 30.25"
vert. stroke - body height 7" - 13.6"
12" - 18.6"
17" - 23.6"
20" - 26.6"
Axes 3 - T, R, Z
Range of Motion T: 500°
R:
- 5.25"-5.25": [-10.5", 10.5"]
- 7.25"-7.25"; [-14.5", 14.5"]
- 4"-8"-4": [-16", 16"]
Z: 7"; 12"; 17"; 20"
Performance  
Payload (Dynamic/Static) 2lbs
Repeatability T: +/- 0.01°
R: +/- 0.001"
Z: +/- 0.001"
Environment  
Cleanliness ISO Class 1 Compatible
Wafer contact Materials Vespel, Peek, Teflon impregnated anodized AI, Alumina, Stainless Steel
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
89/336/EEC(EMC)
SEMI S2-93A
Standards to Verify Compliance EN 60204-1
EN 292-1
EN 292-2
Reability  
Reliability per SEMI E10 >15M MCBF

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance    with the SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication interface: RS232, Ethernet (optional).