Alignment and Calibration
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Genmark Automation provides the technology to slashes the time needed to calibrate a typical semiconductor manufacturing tool from hours to minutes.
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Genmark Automation’s EZTeach™ technology integrates apparatus, methods, and application software for automating the process of robot teaching.
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The Edge-Grip Pre-Aligners are autonomous devices providing accurate and efficient wafer alignment and exceptional performance when combined with Genmark's Edge-Grip End-Effectors.
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The Remote Pre-Aligner (RPA) is an intelligent robot add-on, providing accurate and non-contact measurement of the eccentricity and the orientation of substrate placement.
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The Standalone Pre-Aligner is an autonomous device, which provides accurate, non-contact measurement of the eccentricity and orientation of substrate placement.
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The RIVP is engineered for use with all Genmark vacuum robots, providing accurate, non-contact measurement of the eccentricity and the orientation of the substrate placement in vacuum environments.
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This remote measurement unit, comprising with three CCDs (Charge Coupled Devices), is designed to work with flat panel handling robots in order to determine the position and orientation of a flat panel.
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