State of the Art Motion Control Features

• Control of versatile robotic structures, including "yaw", "pitch" and "roll" motion capabilities



• S-curve velocity profiling, based on polynomial splines and Bernstein-Bezier curves



• Continuous path control in multi-segment smooth trajectories



• Synchronization of multiple axes



• Trajectory control with user defined velocity profiles



• Kinematical modeling of open and closed loop mechanisms



• Singularity consistent path planning and singularity avoidance



• Optimal PID filter tuning



• Automatic adjustment with respect to the surrounding equipment (cassettes, process stations, etc.)



• Tilting capabilities in terms of the end-effector frame



• Compensation for deflection of the end effector, the manipulated object and geometric in accuracies of the arm Scanning and Aligning Features



• Wafer mapping based on through-beam or reflective sensors



• Automatic detection of the planarity and the center of wafers and FPD



• Non contact FPD aligning. Misalignment compensation on the fly Safety

Features

• Programmable travel limits



• Position tracking error detection



• Amplifier overload protection



• Emergency stop