Genmark’s Vacuum Cluster Integration System implements the latest automation technologies to its family of factory automation solutions. The Vacuum Cluster Tool Integration System is a complete turn-key solution, specifically configurable to the customer’s exact automation requirements.
The Vacuum Cluster Tool Integration System features a customer-specific vacuum chamber, Genmark’s MiniMax Front End Module (EFEM), load lock options, and integrated in-vacuum wafer handling solutions, all controlled by Genmark’s latest ECS300 Automation Software Suite.
The integrated in-vacuum wafer handling solutions includes robotics featuring the patented GPR technology, based on a six-degree of freedom servo-controlled system that can compliantly and intelligently interact with misaligned process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.
The integrated MiniMax EFEM system feature robotic handlers that include patented GPR and YAW technologies. The patented YAW technology enables wafer handler robots installed in EFEM systems to access in-line FOUPS and cassettes from a fixed centralized location, and eliminates the need for radial placement of process and other stations around the robot.
| Enclosure | |
| Base Frame | Welded steel |
| Coating | Baked powder coat |
| Wafer Size | Up to 450 mm |
| Automation | |
| Atmospheric Robot (types) | AVR 3000, GPR-SMV |
| End Effector (types) | Gravity |
| Pre-Aligner (types) | Vacuum pre-aligner (option) |
| Payload | Up to 20 lbs |
| Autoteaching (option) | Simplifies station teaching and saves time |
| Cluster tool controller | Coordinates the operation of all devices integrated in the tool and interfaces with process modules, FAB host and operator |
| Physical Properties | |
| Diameter | 44.25" |
| Air Pressure: Relative to Cleanroom Ambient | |
| Port Closed | 65+/-5 psig |
| Load/Unload | 65+/-5 psig |
| Standards Compliance | |
| SEMI |
-SEMI S1-0701 – Safety Guidelines for Equipment Safety Labels - SEMI S2-1102 – Environmental, Safety, and Health Guideline for Sem iconductor Manufacturing Equipment - SEMI S7-96 – Safety Guidelines for Environmental, Safety, and Health (EHS) Evaluation of Semiconductor Manufacturing Equipment - SEMI S8-0701 – Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment - SEMI S9-1101 – Safety Guidelines for Electrical Design Verification Tests for Semiconductor Manufacturing Equipment - SEMI S10-1296 – Safety Guidelines for Risk Assessment - SEMI S13- 0298 – Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment - SEMI E20-0697 – Cluster Tool Module Interface: Electrical Power and Emergency Off Standard - SEMI E21-94 – Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard - SEMI E24-92 – Cluster Tool Module Interface: Isolation Valve Interlocks Standard - SEMI E25-92 – Cluster Tool Module Interface: Module Access Guideline - SEMI E26-92 – Radial Cluster Tool Footprint Standard - SEMI E44-96 – Guide for Procurement and Acceptance of Minienvironments - SEMI E54-0997 – Sensor/Actuator Network Standard - SEMI E57-0600 – Mechanical Specification for Kinematic Couplings Used to Align and Support 300mm Wafer Carriers - SEMI E58-0301 – Autom ated Reliability, Availability, and Maintenability Standards (ARAMS): Concepts, Behavior and Services - SEMI F47-0400 – Specification for voltage sag immunit |
| Other Standards | CE Standards, International Sematech Integrated Minienvironment Best Design Practices |
| Environment | |
| Cleanliness | Better than Class 1 |
| Vacuum Chamber | |
| Operating Range |
- Low Pressure: 10E-6 to 10E-2 Torr - High Pressure: 10E-2 to 10E2 Torr |
| Chamber Material | Aluminum 6061-T6 |
| Viewport Material | Zelux (Optical Grade), 7056 Glass |
| Ultimate vacuum | Better than 10-6 Torr (Turbo pump, ISO 100 port) |
| Transfer valves | Standard 50 x 336 mm |
| Wafer presence sensors | Embedded in the tool |
| Robot mounting | Top or bottom robot mounting available |
| Vacuum robot type | Accommodates single or dual arm vacuum robot |
