Genmark’s expansive Substrate Stocker series supporting front-end and back-end IC manufacturing processes incorporates its most advanced robotics, motion control and software technologies to achieve high levels of automation in the storage, retrieval and tracking of many types of wafer carriers, box reticles and molds used in semiconductor fabrication environments.
Among one of the stocker’s unique design features are high performance robots with extended vertical travel via vertical track enabling fast storage and scalable capacity.
Genmark’s highly sophisticated ECS300 Equipment Control Software is offered as a standard feature.
| Enclosure | |
| Base Frame | Welded Steel |
| Coating | Baked powder coat |
| Capacity (Stocker) | 2500 panels |
| Fan Filter | |
| Filter media | PTFE ULPA 99.99995% @ 0.1 micro meters efficiency |
| Wafer Size | Panels 14" x 13" |
| Automation | |
| Atmospheric Robot (types) | Stocker robot extended vertical travel |
| End Effector (types) | Vacuum |
| Pre-Aligner (types) | Flat panel |
| User Interface | Keyboard, mouse, touch screen |
| Software Interface | SEMI E30, E84, E87, E90, E40, E94, E99, E118, E116 |
| Communications | RS232 (SECS-I), Ethernet (HSMS) |
| Physical Properties | |
| Length | 152.11" |
| Air Pressure: Relative to Cleanroom Ambient | |
| Port Closed | Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa) |
| Load/Unload | Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa) |
| ME Recovery time | < 38 sec |
| Air Flow Velocity | 90 +/- 10% ft/min, (0.45 +/- 10% m/sec) |
| Standards Compliance | |
| SEMI |
- SEMI S1-0701 - SEMI S2-1102 - SEMI S7-96 - SEMI S8-0701 - SEMI S9-1101 - SEMI S10-1296 - SEMI S13-0298 - SEMI E15-0698 - SEMI E4-96 - SEMI E54-0997 - SEMI E57-0600 - SEMI E58-0301 - SEMI F47-0400 |
| Other Standards | CE Standards, International Sematech Integrated Minienvironmental Best Design Practices. |
| Environment | |
| Cleanliness | Better than class 1 |
