Product Highlight

Substrate Stocker Systems
 

Substrate Stocker Systems

Genmark’s expansive Substrate Stocker series supporting front-end and back-end IC manufacturing processes incorporates its most advanced robotics, motion control and software technologies to achieve high levels of automation in the storage, retrieval and tracking of many types of wafer carriers, box reticles and molds used in semiconductor fabrication environments.

Among one of the stocker’s unique design features are high performance robots with extended vertical travel via vertical track enabling fast storage and scalable capacity.

Genmark’s highly sophisticated ECS300 Equipment Control Software is offered as a standard feature.

Specifications:

Enclosure  
Base Frame Welded Steel
Coating Baked powder coat
Capacity (Stocker) 2500 panels
Fan Filter  
Filter media PTFE ULPA 99.99995% @ 0.1 micro meters efficiency
Wafer Size Panels 14" x 13"
Automation  
Atmospheric Robot (types) Stocker robot extended vertical travel
End Effector (types) Vacuum
Pre-Aligner (types) Flat panel
User Interface Keyboard, mouse, touch screen
Software Interface SEMI E30, E84, E87, E90, E40, E94, E99, E118, E116
Communications RS232 (SECS-I), Ethernet (HSMS)
Physical Properties  
Length 152.11"
Air Pressure: Relative to Cleanroom Ambient
Port Closed Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa)
Load/Unload Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa)
ME Recovery time < 38 sec
Air Flow Velocity 90 +/- 10% ft/min, (0.45 +/- 10% m/sec)
Standards Compliance  
SEMI -    SEMI S1-0701
-    SEMI S2-1102
-    SEMI S7-96
-    SEMI S8-0701
-    SEMI S9-1101
-    SEMI S10-1296
-    SEMI S13-0298
-    SEMI E15-0698
-    SEMI E4-96
-    SEMI E54-0997
-    SEMI E57-0600
-    SEMI E58-0301
-    SEMI F47-0400
Other Standards CE Standards, International Sematech Integrated Minienvironmental Best Design Practices.
Environment  
Cleanliness Better than class 1