Product Highlight

SortMax300 HWS<span class='small-trade'>™</span>
 

SortMax300 HWS

Gain competitive advantage with Genmark's SortMax300 HWS™ wafer sorter-packing solution, designed to automatically sort, pack, and unpack wafers up to 300mm without damage and with absolute traceability.

Wafers are quickly sorted and transferred between FOUP/FOSB cassettes and horizontal wafer shippers (“coin stackers"), for shipment to manufacturing facilities.

SortMax300 HWS™ offers improved yields results by eliminating the risk of wafer scratches as well as reduced wafer costs through the reduction of packing costs and wafer losses.

Genmark's SortMax300 HWS™ wafer sorter-packing solution is reliable, fast and cost-effective solution to meet fab’s automated wafer storage and shipment needs.

Genmark’s highly sophisticated ECS300 Equipment Control Software is offered as a standard feature.

Specifications:

Enclosure  
Base Frame Welded steel, BOLTS compatible load ports
Coating Baked powder coat
Load ports Min four (1 FOUP/FOSB, 1 HWS, 1 I/O HWS inserts and foams, one empty), max eight
Fan Filter  
Fan Filter Unit Per customer specification
Filter media PTFE ULPA 99.99995% @ 0.1 micro meters efficiency
Wafer Size 200mm and 300mm
Wafer Carrier 13 or 25 slots FOUP/FOSB
200mm open cassette,
200mm and 300mm HWS (horizontal wafer shipper)
Automation  
Atmosphere Robot (types) GREX4 (for axes, dual arm) on horizontal track
End Effector (types) Inserts EE – Vacuum gripping, no flipping
Wafer EE – Vacuum gripping, flipping.
Pre-Aligner (types) Vacuum gripping chuck
Wafer Mapping Through-beam
Throughput 170 WPH load/unload HWS
202 WPH sorting FOUP/FOSB
User Interface Keyboard, mouse, touch screen
Software Interface SEMI E30, E84, E87, E90, E40, E94, E99, E118, E116
Communications RS232 (SECS-I), Ethernet (HSMS)
Physical Properties  
Length Four load ports – 53. 3" (1355mm)
Six load ports – 73. 2" (1860mm)
Eight load ports – 93.1 (2365mm)
Air Pressure: Relative to Cleanroom Ambient
Port closed Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa)
Load/Unload Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa)
ME Recovery time <38 sec
Air Flow Velocity 90 +/- 10% ft/min, (0.45 +/- 10% m/sex
Standards Compliance  
SEMI -    SEMI S1-0701 – Safety Guidelines for Equipment Safety Labels
-    SEMI S2-1102 – Environmental, Safety, and Health Guideline for Semiconductor Manufacturing Equipment
-    SEMI S7-96 – Safety Guidelines for Environmental, Safety, and Health (EHS) Evaluation.
Other Standards CE Standards, International Sematech Integrated Minienvironment Best Design Practices.
Environment  
Cleanliness Better than Class 1