Gain competitive advantage with Genmark's SortMax300 HWS™ wafer sorter-packing solution, designed to automatically sort, pack, and unpack wafers up to 300mm without damage and with absolute traceability.
Wafers are quickly sorted and transferred between FOUP/FOSB cassettes and horizontal wafer shippers (“coin stackers"), for shipment to manufacturing facilities.
SortMax300 HWS™ offers improved yields results by eliminating the risk of wafer scratches as well as reduced wafer costs through the reduction of packing costs and wafer losses.
Genmark's SortMax300 HWS™ wafer sorter-packing solution is reliable, fast and cost-effective solution to meet fab’s automated wafer storage and shipment needs.
Genmark’s highly sophisticated ECS300 Equipment Control Software is offered as a standard feature.
| Enclosure | |
| Base Frame | Welded steel, BOLTS compatible load ports |
| Coating | Baked powder coat |
| Load ports | Min four (1 FOUP/FOSB, 1 HWS, 1 I/O HWS inserts and foams, one empty), max eight |
| Fan Filter | |
| Fan Filter Unit | Per customer specification |
| Filter media | PTFE ULPA 99.99995% @ 0.1 micro meters efficiency |
| Wafer Size | 200mm and 300mm |
| Wafer Carrier |
13 or 25 slots FOUP/FOSB 200mm open cassette, 200mm and 300mm HWS (horizontal wafer shipper) |
| Automation | |
| Atmosphere Robot (types) | GREX4 (for axes, dual arm) on horizontal track |
| End Effector (types) |
Inserts EE – Vacuum gripping, no flipping Wafer EE – Vacuum gripping, flipping. |
| Pre-Aligner (types) | Vacuum gripping chuck |
| Wafer Mapping | Through-beam |
| Throughput |
170 WPH load/unload HWS 202 WPH sorting FOUP/FOSB |
| User Interface | Keyboard, mouse, touch screen |
| Software Interface | SEMI E30, E84, E87, E90, E40, E94, E99, E118, E116 |
| Communications | RS232 (SECS-I), Ethernet (HSMS) |
| Physical Properties | |
| Length |
Four load ports – 53. 3" (1355mm) Six load ports – 73. 2" (1860mm) Eight load ports – 93.1 (2365mm) |
| Air Pressure: Relative to Cleanroom Ambient | |
| Port closed | Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa) |
| Load/Unload | Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa) |
| ME Recovery time | <38 sec |
| Air Flow Velocity | 90 +/- 10% ft/min, (0.45 +/- 10% m/sex |
| Standards Compliance | |
| SEMI |
- SEMI S1-0701 – Safety Guidelines for Equipment Safety Labels - SEMI S2-1102 – Environmental, Safety, and Health Guideline for Semiconductor Manufacturing Equipment - SEMI S7-96 – Safety Guidelines for Environmental, Safety, and Health (EHS) Evaluation. |
| Other Standards | CE Standards, International Sematech Integrated Minienvironment Best Design Practices. |
| Environment | |
| Cleanliness | Better than Class 1 |
