Genmark’s Vacuum Cluster Integration System implements the latest automation technologies to its family of factory automation solutions.View More
The ECS300 Automation Software Suite is a set of software components, tools and techniques used for rapid development of equipment automation applications. It offers off-the-shelf factory host-computer interface, which are compliant with all related SEMI standards. The product features advanced user interface, broad range of supported automation hardware and presets for many 300mm semiconductor factories.View More
Genmark’s SortMax300 HT™ is capable of achieving the highest wafer per hour throughput requirements while operating under strict reliability and cleanliness specifications.View More
Genmark’s SortMax300 HT™ is capable of achieving the highest wafer per hour throughput requirements while operating under strict reliability and cleanliness specifications. Based on modular design it can support configurations up to 8 FOUP/FOSB stations. Highest throughput capacity is a result of expanded technological features including uniquely designed dual end-effector wafer transfer mechanisms based on Genmark’s proven GREX dual arm robot series.
SortMax300 HT™ also offers highly improved software functionality and reliability based on the latest ECS300 Equipment Control Software suite. Along with rapid set-up, the highly sophisticated software suit has been improved to included built-in support for the latest fab requirements. Special “auto-teach” scripts are included to further simplify the wafer-handler teaching process, optimize operator interface and reduce downtime during maintenance periods.
Genmark's high throughput wafer sorter SortMax300 HT™ is designed for handling up to 300mm wafers and is offered in standard or custom configurations. A wide array of end-effectors, wafer mappers and single or dual wafer aligners are some of its many options.
|Base Frame||Welded steel, BOLTS compatible load ports|
|Coating||Baked powder coat|
|Capacity (Stocker)||Up to 8 Loadports|
|Fan Filter Unit||Per customer specification|
|Filter Media||PTFE ULPA 99.99995% @ 0.1 micro meters efficiency|
|Wafer Size||Up to 300 mm|
|Atmospheric Robot (types)||Grex4|
|End Effector (types)||Vacuum gripping, Edge gripping|
|Pre-Aligner types||Vacuum gripping chuck; edge gripping chuck|
|User Interface||Keyboard, mouse, touch screen|
|Software Interface||SEMI E30, E84, E87, E90, E40, E94, E99, E118, E116|
|Communications||RS232 (SECS-I), Ethernet (HSMS)|
Two load ports – 45"
Three load ports – 66"
Four load ports – 80"
|Air Pressure: Relative to Cleanroom Ambient|
|Port closed||Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13Pa)|
|Load/Unload||Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13Pa)|
|ME Recovery time||< 38 sec|
|Air Flow Velocity||90 +/- 10% ft/min, (0.45 +/- 10% m/sec)|
- SEMI S1-0701
- SEMI S2-1102
- SEMI S7-96
- SEMI S8-0701
- SEMI S9-1101
- SEMI S10-1296
- SEMI S13-0298
- SEMI E15-0698
- SEMI E44-96
- SEMI E54-0997
- SEMI E58-0301
- SEMI F47-0400
|Other Standards||CE Standards, International Sematech Integrated Minienvironment Best Design Practices.|
|Cleanliness||Class 1000 or better|