Porta R5™ Load Port

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		Features Standards Particle Performance Specification Background Particles (Static Counts) Conclusions

Genmark Automation's Porta R5™ is a BOLTS compatible load port specifically designed for automated reticle loading. It features a transparent enclosure accommodating up to 6 individual containers for 125 mm reticles. The enclosure has scanning sensors indicating the proper placement of each container and the reticle presence inside of it. The Porta R5™ has electromagnetic door lock, servo-actuated reticle box opener and isolation door providing fully automated and safe reticle access.

Features

BOLTS Compatible Mechanical Interface Compatible Carriers - 125mm Reticle Boxes Box Placement Sensor for each slot Reticle Presence Sensor for each slot Electromagnetic Door Lock Door Closed Indicator Carrier Presence Indicator Access OK Indicator Load Time: 8 sec. Unload Time: 8 sec. Outstanding performance based on servo controlled mechanisms 2 optional manual access buttons Optional kinematic coupling for accurate mounting Equipped with Easy-Mount lift mechanism Minimal particle, vibration and noise generation Modular design, easy maintenance access

Standards S2 Compliance S8 Ergonomics guideline compliance E44 Guide for Procurement and Acceptance of Minienvironments E57 Mech. Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers E10 Availablity Other Standards Seismic Stability for UBC Zone 4 area and S2 EU Machinery Directive EU Low voltage dir. EU EMI/ESD Carrier ID Reader per I300I Factory guideline MCBIp > 150K cycles MCBI > 321,877 cycles MTTR up to 60 minutes Availability 99.89%

Particle Performance Specifications:

Airborne Probe Placement

The airborne sample probe was positioned 0.5 - 1.0 inch from the sample locations, pointed toward the sample location. Where mechanical movement would create collision between the airborne probe and the moving part, the airborne sample probe was positioned 0.5 - 1.0 inch from the closest approach of that moving part.

Background Particles (Static Counts)

Background counts quantify the particles due to all factors except system movement. This includes particles from the test procedure itself.

• A full foup door opening operation was performed periodically.



• The Porta R5™ was opened and closed one time every eight minutes. The reminder of time, it was stationary.



• The cumulative sampling time at each measurement location was 3 minutes

Conclusions:

• Particle counts on the process side of the Porta R5™ are within the ISO Class 2 limit.



• Particle counts on the operator side of the Porta R5™ are within the Federal Standard 209E Class 1 limit