Porta FOSB™ Load Port

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		Features Conforming SEMI Standards Particle Performance Specification Background Particles (Static Counts) Conclusions

Genmark Automation’s Porta FOSB™ is versatile load port specifically designed for 300mm Front Opening Storage Boxes (FOSB). The device has a tilting platform allowing for secure manual transfer and opening of the 300mm carriers. The Porta FOSB™ is isolated by servo actuated enclosure providing safe access to the wafers and clean front-end mini-environments. The versatility of the design can accommodate 150mm or 200mm open cassettes. Dedicated carrier presence sensors indicate the size of the loaded carrier. Controlled by onboard computer and controller, the equipment and operator is safeguarded by several hardware and software safety interlocks. Designed in accordance with all applicable SEMI standards and I300I guidelines, the Porta FOSB raises the benchmark in performance, reliability, functionality for the equipment in this category.

Features

BOLTS Compatible Mechanical Interface Compatible Carriers - 300mm FOSB, 200mm, 150mm Open Cassettes Carrier Presence Sensors for each wafer size Carrier Presence Indicator Access OK Indicator Load Time: 28 sec. Unload Time: 28 sec. Outstanding performance based on servo controlled mechanisms Minimal particle, vibration and noise generation Modular design, easy maintenance access

Conforming SEMI Standards E15.1: Load Port S2 Compliance S8 Ergonomics guideline compliance E44 Guide for Procurement and Acceptance of Minienvironments E57 Mech. Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers E10 Availablity Other Standards Seismic Stability for UBC Zone 4 area and S2 EU Machinery Directive EU Low voltage dir. EU EMI/ESD Carrier ID Reader per I300I Factory guideline MCBIp > 150K cycles MCBI > 321,877 cycles MTTR 60 minutes Availability 99.89%

Particle Performance Specifications:

Airborne Probe Placement

The airborne sample probe was positioned 0.5 - 1.0 inch from the sample locations, pointed toward the sample location. Where mechanical movement would create collision between the airborne probe and the moving part, the airborne sample probe was positioned 0.5 - 1.0 inch from the closest approach of that moving part.

Background Particles (Static Counts)

Background counts quantify the particles due to all factors except system movement. This includes particles from the test procedure itself.

• A full foup door opening operation was performed periodically
• The Porta FOSB™ was opened and closed one time every eight minutes. The reminder of time, it was stationary
• The cumulative sampling time at each measurement location was 3 minutes

Conclusions:

• Particle counts on the process side of the Porta FOSB™ are within the ISO Class 2 limit
• Particle counts on the operator side of the Porta FOSB™ are within the Federal Standard 209E Class 1 limit