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Porta 300™ Load Port
The Porta300™ is an advanced load port for 300mm wafer
carriers. Uniquely designed, yet with accordance to all applicable SEMI
standards and I300I guidelines, the Porta300™ sets a new benchmark in
cleanliness, reliability, performance and functionality for the equipment in
this category. It features unique Integrated Pre-Aligner option providing space
saving and cost effective wafer alignment solution. The state-of-the art wafer
mapping delivers 100% accuracy. All major motions are servo controlled,
providing fast and precise carrier loading.
The operation of the opener is controlled by full set of
safety interlocks protecting both the operator and the equipment. A dedicated
set of through-beam sensors avoids collision with robotic arm or wafer. The E84
connector is a standard feature along with the visual indicators – provided in
compliance with the latest revision of the E87 standard. The software support,
integrated in the Gencobot
Toolbox, provides simple yet comprehensive diagnostic features and
user-friendly operator interface.
Features:
• Outstanding performance based on servo controlled mechanisms
• Bar-code, IR and RF carrier ID reader options
• Through-Beam wafer mapping option
• Built-in SEMI E84 interface
• 8 configurable light signals (SEMI E87 compliant)
• 2 optional manual access buttons
• 150/200mm open cassettes adapter available
• BOLTS interface compliance
• Kinematic coupling for accurate mounting
• Equipped with Easy-Mount lift mechanism
• Minimal particle, vibration and noise generation
• Modular design, easy maintenance access
• New Porta 300 powered by electrical supply only. No need for
pressurized air.
Conforming SEMI Standards:
• E64: Cart Docking Interface
• E15.1: Load Port
• S2 Compliance
• S8 Ergonomics guideline compliance
• E44 Guide for Procurement and Acceptance of Minienvironments
• E57 Mech. Specification for Kinematic Couplings Used to Align and
Support 300 mm Wafer Carriers
• E10 Availablity
• SEMI E1.9-0701 E2 - Mechanical Specification for Cassettes Used to
Transport and Store 300mm Wafers
Other Standards:
• Seismic Stability for UBC Zone 4 area and S2
• EU Machinery Directive
• EU Low voltage dir.
• EU EMI/ESD
• Carrier ID Reader per I300I Factory guideline
• MCBIp >158K cycles
• MCBI > 338,00 cycles
• MTTR 12 minutes
• Availability 99.9%
Porta 300
Open Cassette Adapter
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Particle Performance Specification:
Airborne Probe Placement
The airborne sample probe was positioned 0.5 - 1.0 inch from the
sample locations, pointed toward the sample location. Where
mechanical movement would create collision between the airborne
probe and the moving part, the airborne sample probe was positioned
0.5 - 1.0 inch from the closest approach of that moving part.
Background Particles (Static Counts)
Background counts quantify the particles due to all factors except
system movement. This includes particles from the test procedure
itself.
• A full foup door opening operation was performed periodically.
• The PORTA 300 was opened and closed one time every eight
minutes. The reminder of time, it was stationary.
• The cumulative sampling time at each measurement location was
3 minutes
Conclusions:
• Particle counts on the process side of the Porta300™ are
within the ISO Class 2 limit.
• Particle counts on the operator side of the Porta300™ are
within the Federal Standard 209E Class 1 limit
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