Genmark's next-generation FOUP Stocker systems incorporates advanced robotics featuring highly optimized blended motions and control software technology to achieve fully automation of FOUP storage, retrieval and tracking operations.
The modular design of Genmark's FOUP Stocker systems allows expandable storage capacity per customer’s specific requirements and is easily integrated with semiconductor manufacturing equipment.
Configurable, fast, reliable and cost effective, the Genmark FOUP Stocker systems are designed to meet all fab requirements.
Among its unique design features is a high performance robot with extended vertical travel via vertical track, allowing fast input/output and storage, enabling customers to meet a wide range of Work-In-Progress FOUP storage applications.
| Enclosure | |
| Base Frame | Welded steel |
|
Coating |
Baked powder coat |
| Capacity (Stocker) | Total of 8 FOUP stations |
| Wafer Size | 300mm FOUP |
| Automation | |
| Atmospheric Robot (types) | X, Z gantry robot |
| End Effector (types) | Pneumatic Gripper |
| User Interface | Keyboard, mouse, touch screen |
| Software Interface | SEMI E87, E99, S2, S |
| Communications | RS232 |
| Physical Properties | |
| Length | 90.8" |
| Height | 126" |
| Depth | 24.5" |
| Weight | TBD |
| Facilities | |
| Input Voltage | 115VAC |
| Input Current | 10-15A |
| Pneumatic requirement | >40 psi |
| Standards Compliance | |
| SEMI | SEMI E15, E47,E99, S2, S8, |
| Other Standards | CE |
| Environment | |
| Cleanliness | Class 10000 |
| Operating Temperature | 10 deg C to 40 deg C |
| Storage Temperature | 5 deg C to 50 deg C |
| Throughput | |
| Throughput | < 15 sec |
| OHT Input/Output Port | |
| OHT Input/Output Port | 2 |
| Payload | |
| Payload | 10kg (Full FOUP) |
