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Vacuum
Cluster Integration System |
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A complete solution to meet your wafer
transferring needs. |
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Mini-Max |
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Genmark Automation’s MiniMax™ System
Equipment Front End Module (EFEM) |
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Sort-Max |
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The Sort-Max™ is a next generation sorter producing the highest throughput utilizing clean technology and rapid software set-up. |
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Porta 300 |
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The Porta300™ is an advanced load port for 300mm wafer carriers. |
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Porta FOSB |
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Genmark Automation’s Porta FOSB™ is versatile load port specifically designed for 300mm Front Opening Storage Boxes (FOSB). |
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Porta R5 |
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Genmark Automation's Porta R5™ is a BOLTS compatible load port specifically designed for automated reticle loading. |
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Porta R6 |
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Genmark Automation's Porta R6™ is a BOLTS compatible load port specifically designed for automated reticle loading. |
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