The Standalone Pre-aligner is an autonomous device, which provides accurate, non-contact measurement of the eccentricity and orientation of substrate placement. It can be integrated with numerous substrate-manipulating devices when high alignment accuracy is required in the face of wide range initial substrate-misplacement.

The substrate can be placed onto a chuck or onto optional resting pins of the pre-aligner, depending on the shape of the robot's end effector. The chuck is equipped with two servo-axes, X and Y, which enable it to move underneath the substrate (which at that time is resting on the pins) and compensate for any misalignments. The operations of the Standalone Pre-aligner include wafer displacement measurement, calculation of the necessary compensation, and orientation of the notch (or the flat) to the desired angle. The high-resolution and accuracy of the chuck-movement guarantees very precise alignment in wide range substrate displacement.

The Standalone Pre-aligner is designed for use in a wide range of applications regardless of the size, shape, transparency, and thickness of the substrates that are to be aligned. The custom-designed lighthouse provides accurate and reliable measurement of both solid and transparent objects. The built-in optics allow for substrate thickness as much as 6 mm. The pre-aligner can measure wafers with diameters ranging from 75 to 300 mm and square substrates from 75 to 200 mm. An optional moving lighthouse provides software-controlled adjustment to the different substrate sizes.

FEATURES
• An autonomous device allows substrate alignment without participation of the robot
• High accuracy, performance and reliability
• Cost-effective, seamless integration with Genmark robots
• Versatility - measures all substrate sizes and shapes, both solid and transparent without adjustment

SPECIFICATIONS
· Alignment Accuracy:
  - Center Offset - 0.0005"
  - Angular Offcet - 0.05°
· Alignment time
 - Less than 4 sec for 300mm wafers
  -Less than 3.5 sec for 200mm wafers
· Initial offset allowance - 75, 100, 150, 200 and 300mm
· Wafer sizes - 75, 100, 150, 200 and 300mm
· Servo light-house gap - 0.35" [8.89mm]
· Length - 12.7" [322.6mm]
· Width - 8.2" [208.28mm]
· Height - 6.9" [175.26mm]
· Weight - 15 lb.[6.9mm]