GB8-TL

Telescopic Robot Featuring GPR™ Technology

Designed for ultra-precise transport of both wafers and large, high resolution flat panel displays, the Gencobot 8 Telescopic Robot (GB8-TL) combines increased reach and load capacity while employing Genmark’s breakthrough GPR™ system. The GPR™ (Gimbal-Position Robotics) System, using Genmark’s patented technology, is a six degrees of freedom servo-controlled robot that can compliantly interact with misaligned cassettes and process modules as well as deliver deflection compensation during transport. The GB8-TL is an exceptionally robust, structurally reinforced transport system capable of handling wafers, reticles and flat panels. Utilizing the unique single and double yaw-axis feature of the GB8Y-TL eliminates the need for radial placement of process stations / cassettes around the robot. The robot is available in 2 or 3 platform configurations.

Specifications:

• Arm Configurations:
 8"-8",
 4"-8"-4",
 6"-12"-6",
 8"-16"-8",
 9"-18"-9",
 4"-8"-8"-4"

• Maximum reach
  Four-Link Arm (4”-8”-8”-4”) - >48”
  Three-Link Arm (9”-18”-9”) - 72”
  Three-Link Arm (8”-16”-8”) - 64”
  Three-Link Arm (6”-12”-6”) - 48”
  Three-Link Arm (4”-8”-4”) - 32”
  Two-Link Arm (8”-8”) - 32"

• Maximum Vertical Stroke: 40"

• Maximum velocity:
 T = 600º/sec
 R = 50 "/sec
 Z = 20"/sec
 If equipped with Y and Y2 end-effector:
 Y = 1500º/sec
 Y2 = 1500º/sec

• Maximum acceleration:
 T = 1500º/sec²
 R = 200 "/sec²
 Z = 60 "/sec²
 If optionally equipped with Y and Y2 end-effector:
 Y = 2500º/sec²
 Y2 = 2500º/sec²

• Minimum work envelope:
 (Equipped with 6"-12"-6" arm and 9.5" end-effector)
 200 mm: D = 18"
 300 mm: D = 20"

• Repeatability:
 T = ± 0.01º
  R = ± 0.001"
 Z = ± 0.001"

• Robot weight: 225 lbs.

• Max wafer sizes: 300mm;
 FPD Sizes: Up to 1m²

• Payload capacity: 10 lbs.