GB8-SM

The GB8-SM is a precise, high-performance dual arm robot. The combination of global linear motion of a two-links arm (R-axis) and rotation (Y-axis) of two swapping arms (A1 and A2 axes) ensure an optimal handling of up to 3 in-line FOUPs at standard distance 505mm without using a track system. The GPR system, implemented in the robot, allows deflection compensation during the wafer transfer and proper handling of misaligned cassettes. A wafers mapping in a standard 300mm FOUP is provided by a through-beam scanner, attached to the robot arm. Advance motion planning guaranties smooth motion and quick swapping of wafers at the process positions.

Features:

• Minimized idle–time of the process modules due to quicker wafer-swap
• Fast linear motion of the transport arm eliminates the need of a track
• Capability to predefine the direction of the linear motion eliminates the need of precise aligning of robot in regard with the source and process modules
• Patented GPR technology allows deflection compensation and easies the alignment of the pick/place positions
• Through-beam scanning capability
• Vacuum or Edge Gripping End Effector
• Advanced motion planning and axes coordination

Product specification

Arm Configuration:

• Global Translation Arm 11.075”-11.075”
• Dual (Swapping) Arm 6.45”-6.45”

Motion Range:

• R-axis +/-21”(533mm)
• T-axis +/-250°
• Y-axis +/-300°
• A1 and A2 axes from –7.8”(198mm) to +12.8”(325mm)
• Z-axis up to 13.5”

Maximum Velocity:

• R-axis 60”/s
• T-axis 300°/s
• Y-axis 500°/s
• A1 and A2 axes 80”/s
• Z-axis up to 12”

Maximum Acceleration:

• R-axis 80”/s²
• T-axis 500°/s²
• Y-axis 600°/s²
• A1 and A2 axes 100”/s²
• Z-axis 15”/s²

Resolution:

• R-axis 1.8E-4”
• T-axis 0.0014°
• Y-axis 5.0E-4°
• A1 and A2 axes 2.7E-4”
• Z-axis 2.62E-5”

Repeatability:

• R-axis +/-0.001”
• T-axis +/-0.01°
• Y-axis +/-0.01°
• A1 and A2 axes +/-0.001”
• Z-axis +/-0.001”