GB8

High Precision, High Payload, Wafer Transport Robot Featuring GPR™ Technology

Designed for ultra-precision transport of both wafers and large, high resolution flat panel displays, the Gencobot 8 Robot combines increased reach and load capacity while employing Genmark Automation’s breakthrough patented GPR™ system. The GPR™ System is a six degrees of freedom servo-controlled robot that can compliantly interact with misaligned cassettes and process modules as well as deliver deflection compensation during transport. The Gencobot 8 is an exceptionally robust, structurally reinforced transport system capable of handling flat panels weighing up to 10kg and measuring up to 1100mm x 1100mm.

Thin Wafer Handling:
Genmark Automation has developed innovative approaches for handling thin wafers (down to 100 microns). Specially designed end-effector paddles, pre-aligner chucks, lifting pins, along with dedicated motion control software guarantee safe material handling overcoming increased wafer sag and fragility. The option of a flipping end-effector is also available.

Specifications:

• Arm Configurations:
 8.05"-8.05",
 4.425"-8.85"-4.425",
 5.95"-11.9"-5.95",
 8.05"-16.1"-8.05",
 9"-18"-9"

• Maximum vertical stroke: 12.75", 17", 20" and 25"

• Maximum velocity :
 T = 600º/sec
 R = 50"/sec
 Z = 10"/sec
 If equipped with Y and Y2 end-effector:
 Y = 1500º/sec
 Y2 = 1500º/sec

• Maximum acceleration:
 T = 1500º/sec²
 R = 200 "/sec²
 Z = 40 "/sec²
 If equipped with Y and Y2 end-effector:
 Y = 2500º/sec²
 Y = 2500º/sec²

• Minimum work envelope:
 (Equipped with 6"-12"-6" arm and 9.5" end-effector)
 200 mm: D = 18"
 300 mm: D = 20"

• Repeatability:
 T = ± 0.01º
 R = ± 0.001"
 Z = ± 0.001"

• Robot weight: 170 lbs.

• Max wafer sizes: 300mm

• FPD Sizes: Up to 1m²

• Payload capacity: 10 lbs.