GB7-W

Wet Environment Robot Featuring GPR™ Technology

Genmark Automation, creators of the highly acclaimed GPR™ Series Robots, have introduced their latest addition to the GPR™ (Gimbal-Position Robotics) family. In response to the ever growing demand for automation suitable to operate under wet environment conditions, Genmark Automation has released the Gencobot Wet Environment Robot (GB7-W). Designed with a protective cover to prevent water contamination, the GB7-W has successfully addressed all major concerns associated with CMP Automation including slurry deposits in vacuum lines, rust, moisture/humidity damage and premature belt/bearing failure when mounted upside down.

The GB7 robot features Genmark Automation’s breakthrough GPR™ System to achieve the highest level of performance currently available in CMP or "wet" environment wafer applications. The GPR™ (Global Positioning Robot) System, using Genmark Automation’s patented technology, is a up to seven-degree of freedom servo controlled robot that can compliantly interact with misaligned cassettes and process modules as well as deliver deflection compensation during transport.

Specification

• Arm Configurations:
4"-4",
5.25"-5.25",
8"-8",
4"-8"-4",
6"-12"-6"

• Maximum reach
  Three-Link Arm (6”-12”-6”) 48”
  Three-Link Arm (4”-8”-4”) 32”
  Two-Link Arm (8”– 8”) 32"
  Two-Link Arm (5.25”– 5.25”) 21"
  Two-Link Arm (4”– 4”) - 16"

• Maximum vertical stroke: 7”

• Maximum velocity:
  T = 800º/sec
  R = 100 "sec
  Z = 20"/sec
If equipped with Y and Y2 end-effector:
  Y = 1500 º/sec
  Y2 = 1500º/sec

• Maximum acceleration:
  T = 2500º/sec²
  R = 200 "/sec²
  Z = 40 "/sec².
If optionally equipped with Y and Y2 end-effector:
  Y = 2500º/sec²
  Y2 = 2500º/sec²

• Minimum work envelope:
(Equipped with 6"-12"-6" arm and 9.5" end-effector)
  200 mm: D = 18"
  300 mm: D = 20"

• Repeatability:
   T = +/-0.01º
   R = +/-0.001"
   Z = +/-0.001"

• Robot weight: 75 lbs.

• Max wafer sizes: 300mm

• Payload capacity:5 lbs.