GB7-TL

Telescopic Robot Featuring GPR™ Technology

The Gencobot 7 Telescopic Robot (GB7-TL) employs Genmark Automation's breakthrough GPR™ System to achieve the highest level of performance currently available in an automated wafer handler-capable of handling up to 300mm diameter wafers. The GPR™ System, using Genmark Automation’s patented technology, is a multiple degrees of freedom servo-controlled robot that can compliantly interact with misaligned cassettes and process modules, as well as deliver deflection compensation during transport. The unique multi-platform feature of GB7Y-TL doubles the normal vertical stroke limit. Its yaw-axis feature can replace a track system for a variety of in-line processing applications. The GB7-TL and GB7Y-TL can be fitted with various arm configurations to be integrated in a wide range of front-end layouts. The robot is available in 2 or 3 platform configurations.

Specification
• Arm Configurations:8"- 8"

• Maximum reach:32"

• Maximum vertical stroke: 40"

• Maximum velocity:
 T = 800º/sec
 R = 100"sec
 Z = 40"/sec
If equipped with a Y end-effector:
 Y = 1500º/sec

• Maximum acceleration:
 T = 2500º/sec²
 R = 200"/sec²
 Z = 60"/sec²
If equipped with a Y end-effector:
 Y = 2500º/sec²

• Minimum work envelope:
(Equipped with 8"-8" arm and 9.5" end-effector)
 200mm: D = 18"
 300mm: D = 20"

• Repeatability:
 T = 0.01º>
 R = 0.001"
 Z = 0.001"

• Robot weight: 195 lbs.

• Max wafer sizes: 300mm

• Payload capacity: 5 lbs.