GB4S-VT

The GB4S-VT system is a 300mm wafer size oriented system, comprised of a standard GB4S robot with 7" vertical stroke, an elevator on which the robot is mounted, and a 4-axis standalone prealigner, as shown below in Figure 1. The standalone prealigner can be substituted by any type of Remote Integrated Prealigner with 0” vertical travel. This setup allows the robot to handle wafers at extended elevations, and to deliver them to and from wafer boats.

The system can also handle 200mm wafers without any hardware changes, while for the sub 200mm wafer sizes the robot End Effector has to be reconfigured. The time that this reconfiguration takes is usually less than an hour, including the time needed to teach all the pickup positions. Thus, the average teaching time of 45 minutes (for 5 pickup locations) can be achieved thanks to the sophisticated auto-teaching routines provided by the system firmware.

The optional through beam mapping sensor allows for reliable detection of all normally inserted, cross-slotted, or double-slotted wafers in all FOUPs and boats.

Depending on the chosen arm configuration the system can access one or two in-line Semi standard FOUPs. The in-line FOUPs have to be situated at 505mm apart.

From the operational point of view, the system is fully integrated and controlled by a single controller. The movement of the elevator is synchronized with the movement of the robot's vertical axis. This means that when a command is issued to elevate the robot, the vertical axis of the robot is also actuated.

Environment

Operating temperature range: 20° C to 55° C.

Storage temperature range: 20° C to 60° C.

Atmosphere:
  CDA (80% N2) up to 100% Nitrogen.
  No silicone materials to be used anywhere within the system.
  No plastics that rely on their hydroscopic properties to provide a lower coefficient of friction
  (Nylon) are allowed

Humidity: 0% to 60% operating, 0% to 95% non-condensing stored.

Vibration: 1.05 g's maximum vibration

Robot Specification

• Maximum vertical stroke: 20"

• Maximum velocity:
  T = 875°/sec
  R = 87.5"/sec
  Z = 30"/sec

• Maximum acceleration:
  T = 2000°/sec²
  R = 200"/sec²
  Z = 40"/sec²

• Minimum work envelope:
  (Equipped with 4" - 8" - 4" arm and 7" end-effector, 200mm wafer)
  D = 13.35"

• Repeatability:
  T = ±0.01°
  R = ±0.001"
  Z = ±0.001"

• Max wafer size: 300mm

• Robot weight: 50lbs.
  (for 7" vertical travel and 4"-8"-4" arm)

• Payload capacity: 2lbs.

Track Specification - Vertical Track:

• Minimal Travel: 36" [915mm]

• Lead Screw Pitch: 10mm per revolution

• Carriage Travel Speed: 20"/s maximum

• Carriage Acceleration:
 40"/s² maximum

• Encoder resolution:
 2000 x 4 lines per motor revolution

• Repeatability, bi-directional:
 +/-0.025mm [0.001"]

• Load carrying capacity: 80lbs. minimum

• Straightness and Flatness:
 +/-0.008mm/25mm,
 not to exceed +/-0.020mm/300mm

• End of travel sensor:
 Optical limit switches at each end

• Track Motor: Brushless DC Servo motor

• Track Brake: Integrated in the motor, coupled with the motor shaft.

• Lubrication: Dupont Krytox grease 283AZ or compatible