GB4P

Wafer Transport Robot with Integral Wafer Aligner

The Gencobot 4 robot with integral wafer pre-aligner (GB4P), is the most compact robot and pre-aligner package available on the market today. Identical in size to Genmark Automation's popular GB4 robot, the GB4P houses a built-in pre-aligner for wafers ranging from 2"- 8" in diameter. The adjustable lighthouse feature on the pre-aligner allows for simple and fast switching between wafer sizes. Engineered for single or dual wafer transport, the GB4P robot is available with an extensive variety of reach and vertical stroke combinations. Genmark Automation's GB4P is a highly accurate, repeatable, and reliable handling and aligning solution at a competitive price.

Features
• Integrated Pre-Aligner Module
• Adjustable lighthouse for wafers ranging in 2"-8" in diameter
• Fast, accurate, repeatable transport of wafers, and photomasks
• Extended reach and vertical travel options
• DSP-based motion controller for vibration-free wafer transport
• Multi-segment continuous path control
• Optional scanning feature with fast and slow scanning mode

Specification
• Arm Configurations:
  4"-8"-4",
  5.25" - 5.25"

• Maximum reach:
  Three-Link Arm 32"
  Two-Link Arm 21"

• Maximum vertical stroke: 20"

• Maximum velocity:
  T = 875º/sec
  R = 87.5"/sec
  Z = 30"/sec.

• Maximum acceleration:
  T = 2000º/sec²
  R = 200"/sec²
  Z = 40"/sec²

• Minimum work envelope:
  (Equipped with 4"-8"-4" arm and 7" end-effector, 200mm wafer)
  D = 13.35"

• Repeatability:
  T = ±0.01º
  R = ±0.001"
  Z = ±0.001"

• Max wafer size: 200mm

• Robot weight: 59 lb
  (for 7" vertical travel and 4"-8"-4" arm)

• Payload capacity: 2 lbs.

Integrated Pre-aligner:
• Alignment time: 5 sec.
• Alignment accuracy:
  Center Offset = 0.002"
  Angular Offset = 0.1º

• Initial offset allowance: 0.500"

• Max wafer sizes: 200mm