GB4-CTR

Cassette Transfer Robot

The new Gencobot 4 Cassette Transport Robot (GB4-CTR) has been designed to transport 150mm, 200mm and 300mm wafer cassettes quickly and accurately between user defined stations. Applications include stocker bay load and unloading, as well as intra-bay cassette transport between tool loads port and process chambers. The GB4-CTR’s reduced size allows for smooth integration without impacting tool footprint. The robot’s structurally reinforced 2-link arm maintains this compact footprint while providing the payload capacity required for fast, smooth and repeatable transportation of fully loaded cassettes.

Cassette Transport Robot Features
• Accurate repeatable transport of all SEMI compatible 150mm, 200mm and 300mm cassettes
• Compact footprint
• Stocker compatible
• Handle payloads up to 15kg
• DSP-based motion controller for vibration-free cassette transport
• 2-Link Heavy Duty Arm
• Custom end- effector options allow for flexible cassette handling