Press Releases
Integrated Reticle Handling Solutions

Genmark Automation introduces the Porta R5™ and Porta R6™ reticle handling load ports

MILPITAS, Calif. – March 12, 2004 – Genmark Automation, Inc., a leader in tool and factory automation solutions for the global semiconductor industry, today introduced the Porta R5™ and Porta R6™ BOLTS compatible load ports specifically designed for automated reticle loading. It features a transparent enclosure accommodating up to 5 or 6 individual containers for 125 mm reticles, respectivily. The enclosures have scanning sensors indicating the proper placement of each container and the reticle presence inside of it. The Porta R5™ and Porta R6™ have electromagnetic door locks, servo-actuated reticle box openers and an isolation door providing fully automated and safe reticle access.

The Porta R5™ and Porta R6™ feature the following:

BOLTS Compatible Mechanical Interface Compatible Carriers - 125mm Reticle Boxes Box Placement Sensor for each slot Reticle Presence Sensor for each slot Electromagnetic Door Lock Door Closed Indicator Carrier Presence Indicator Access OK Indicator Load Time: 8 sec. Unload Time: 8 sec. Outstanding performance based on servo controlled mechanisms 2 optional manual access buttons Optional kinematic coupling for accurate mounting Equipped with Easy-Mount lift mechanism Minimal particle, vibration and noise generation Modular design, easy maintenance access

About Genmark Automation
Genmark Automation, Inc. is a worldwide leading supplier of factory automation solutions for the semiconductor, flat panel display (FPD) and data storage manufacturing industries. It provides customers with turnkey, highly sophisticated hardware and software automation solutions for both atmospheric and vacuum environments, supporting numerous applications across the semiconductor, FPD and data storage fabrication industries. OEM and fab customers leverage Genmark’s automation technologies to maximize equipment productivity in dynamic manufacturing environments.

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