Genmark Automation’s Swap-Master Dual Arm Robot Adds Built-In Wafer Mapping Sensor Built in Wafer Mapping Sensor Increases System Throughput and Provides Flawless Wafer Transfer

SUNNYVALE, CA - June 12, 2002: Genmark Automation, a leader in global semiconductor tool and factory automation solutions, has added a built-in wafer-mapping sensor to increase system throughput and provide flawless wafer transfer for the fastest, best-in-class system for 200/300mm semiconductor wafer handling equipment.

"The built in scanner will map the wafers in the cassette before transfer, which reduces cost and increases customer ROI. In addition, development in linkage configurations allows versatile arm design to adjust to different applications,” states Genmark Chairman and CEO, Mila Genov. “This is the only robot of its kind and, with the built-in wafer mapping sensor, is a superior replacement to all competitive radial robots on a linear track.”

Genmark’s Global Positioning Robot “Swap-Master” (GPR-SM) features dual end-effector precision mechanisms and the latest in robot motion trajectory control software as the ideal wafer transport solution for processes requiring fast, reliable interface to 2, 3, or 4 in-line 200/300mm FOUPs and Open Cassettes.

The Swap Master can significantly improve efficiency of wafer handling and processing without increasing axial velocity and acceleration. Optional features include a variety of wafer mapping solutions, customized end-effectors, integrated high-resolution wafer aligners and Ethernet connectivity. The design handles up to 300mm wafers and complies with all applicable SEMI standards.

“The Swap Master will increase throughput and, in turn, increase efficiency and productivity for our customers. Genmark is moving to become a single source supplier of front equipment that includes complete minienvironments and ‘Porta 300’ Load Ports.” Ms. Genov reiterates, “As an industry leader, we believe commitment to research and development can only better serve our customers. We see the Swap Master as the culmination of these efforts and a reason why more and more equipment manufacturers look to Genmark as a partner for wafer handling solutions.”

About Genmark
Genmark Automation, Inc. is a worldwide leading supplier of factory automation solutions for the semiconductor, flat panel display and data storage manufacturing industries. We provide our customers with “turn-key,” highly sophisticated hardware and software automation solutions for both atmospheric and vacuum environments, supporting numerous applications across the semiconductor, flat panel, and data storage fabrication industries. OEM and Fab customers leverage Genmark’s automation technologies to maximize equipment productivity in dynamic manufacturing environments.

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