Genmark Automation, the Technological Leading Supplier of 200 / 300mm Automation Solutions, Presents the Innovative PORTA 300™ Front Opening Unified Pod (FOUP) Load Port at SEMICON Europe 2001

Sunnyvale, CA – April 15, 2001: Genmark Automation, a leading supplier of hardware and software automation solutions for the semiconductor industry, will feature its latest integrated automation solutions for 200mm and 300mm market at SEMICON Europe 2001, April 23-26, at the new Munich Trade Fair Center, Booth A2.644.

Genmark’s highly innovative automation solutions are the technological choice for factory automation. Genmark will demonstrate a range of its hardware and software automation products at Semicon Europe, including:

New PORTA 300™ Front Opening Unified Pod (FOUP) Load Port for 300mm

The industry’s newest and most sophisticated 300mm load port, featuring the most accurate and fastest wafer access time (less than 6 sec.). A BOLTS compatible interface solution, the new PORTA 300™ offers easy and seamless integration with the process tool, highest cleanliness, and is prepared for customized configurations including a integrated wafer aligner option, a first in the industry.

GPR-SM™ “SwapMaster” high-throughput wafer handling system Dual wafer precision transport system, based on Genmark’s fab-proven GPR™ technology, the GPR-SM™ is capable of accessing two to four in-line 300mm cassettes, without a track, and is the only production robot available today capable of dual wafer transfer into and out of cassettes following a straight-path , proven to be the fastest and most reliable wafer handling strategy.

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Company Contact:
Marketing Department
Tel: 408-745-6520
Fax: 408-745-0635
Email: marketing@genmarkautomation.com