제품 하이라이트

Porta R5<span class='small-trade'>™</span>
Porta R5<span class='small-trade'>™</span>
Porta R5<span class='small-trade'>™</span>
 

특징:

  • BOLTS Compatible Mechanical Interface
  • Compatible Carriers - 125mm Reticle Boxes
  • Box Placement Sensor for each slot
  • Reticle Presence Sensor for each slot
  • Electromagnetic Door Lock
  • Door Closed Indicator
  • Carrier Presence Indicator
  • Access OK Indicator
  • Load Time: 8 sec.
  • Unload Time: 8 sec.
  • Outstanding performance based on servo controlled mechanisms
  • 2 optional manual access buttons
  • Optional kinematic coupling for accurate mounting
  • Equipped with Easy-Mount lift mechanism
  • Minimal particle, vibration and noise generation
  • Modular design, easy maintenance access

Porta R5

Genmark Automation의 Porta R5 ™은 자동화된 레티클 로딩에 대해 특별히 설계된 BOLTS 호환 로드포트입니다. Porta R5 ™는 125mm 레티클에 대한 개별 컨테이너를 6개까지 수용할 수 있는 투명 인클로저(Enclosure)를 갖고 있있는 특징이 있습니다. 인클로저는 각 컨테이너와 내부의 레티클의 적절한 Align를 나타내는 스캐닝 센서를 갖고 있습니다. Porta R5 ™에는 전자기 도어락, 서보 작동 레티클 박스 오프너, 분리 도어를 갖고 있으며 이는 완전히 자동화 되고 안전하게 레티클에 접근할 수 있게 합니다.

Specification:

Configuration  
Compatibility BOLTS compatible
Carrier Types 6 125mm reticle carriers
Wafer Size 125mm reticles
Substrate Type Reticle
Status Indicators 2 lights - "Placement" and "Action OK"
Operator Push Buttons One Manual Access button
Carrier Sensors Carrier Placement Sensors
Wafer Mapping Reticle presence sensors
Physical Properties  
Clamping Mechnism Lockable interlock of the carriers loading door
Height - 1385mm (54.54 inches) With cart
- 1336mm (52.61 inches) Without cart
Width 470mm (18.50 inches)
Actuation - Servo motor driven carriers opening mechanism
- Servo motor driven door opening mechanism
Performance  
Reliability MCBlp > 150K cycles
MCBl > 321.877 cycles
MTTR 60 minutes
Availability 99.89%
Speed Load 4 seconds
Unload 4 seconds
Environment  
Cleanliness Class 1 ANSI, when in class 100 environment
Standards Compliance  
SEMI - E15.1: Load Port
- S2 Compliance
- S8 Ergonomics guideline compliance
- E44 Guide for Procurement and Acceptance of Minienvironments
- E10 Availablity
Other Standards - Seismic Stability for UBC Zone 4 area and S2
- EU Machinery Directive
- EU Low voltage dir.
- EU EMI/ESD
- Carrier ID Reader per I300I Factory guideline
Reliability per SEMI E10  
MCBF (cycles) > 1M